以可變厚度撓性模具與精準力學控制機台為基礎之奈米壓印系統

Translated title of the thesis: A Nano-Imprinting System Based on Thickness-Varying Flexible Mold and Force Controllable Imprinting Machine
  • 盧 科全

Student thesis: Master's Thesis

Abstract

Date of Award2017 Aug 28
Original languageChinese
SupervisorYung-Chun Lee (Supervisor)

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