以改良式溶膠凝膠法製備Pb(Zr0 52Ti0 48)O3壓電厚膜應用於MEMS壓電加速規之研究

Translated title of the thesis: Study of Pb(Zr0 52Ti0 48)O3 Piezoelectric Thick Films via a Modified Sol-Gel Method for MEMS Piezoelectric Accelerometer Applications
  • 簡 育群

Student thesis: Master's Thesis

Abstract

Date of Award2018 Aug 21
Original languageChinese
SupervisorSheng-Yuan Chu (Supervisor)

Cite this

以改良式溶膠凝膠法製備Pb(Zr0 52Ti0 48)O3壓電厚膜應用於MEMS壓電加速規之研究
育群, 簡. (Author). 2018 Aug 21

Student thesis: Master's Thesis