射頻濺鍍法製備應用於電阻式記憶體之氧化鈮薄膜

Translated title of the thesis: RF Sputter Deposition of NbOx Thin Films for RRAM Applications
  • 施 家絨

Student thesis: Master's Thesis

Abstract

Date of Award2017 Jan 16
Original languageChinese
SupervisorCheng-Liang Huang (Supervisor)

Cite this

射頻濺鍍法製備應用於電阻式記憶體之氧化鈮薄膜
家絨, 施. (Author). 2017 Jan 16

Student thesis: Master's Thesis