直接加速度回授與加速度積分回授於堆疊式雙軸撓性定位平台上之振動控制

Translated title of the thesis: Vibration Control of a Cascaded Tow-Degree-of-Freedom Precision Positioning Stage Using Direct Acceleration and Integrated Acceleration Feedback Schemes
  • 林 洺安

Student thesis: Master's Thesis

Abstract

Date of Award2016 Aug 31
Original languageChinese
SupervisorKuo-Shen Chen (Supervisor)

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