石墨烯作為銅導線介電阻障層漏電流與時依性介電崩潰之研究

Translated title of the thesis: The Study to Explore the Leakage Current and Time Dependent Dielectric Breakdown of Graphene as Dielectric Barriers of Copper Interconnects
  • 鄭 翰哲

Student thesis: Master's Thesis

Abstract

Date of Award2019
Original languageChinese
SupervisorJen-Fin Lin (Supervisor)

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