磊晶過程之晶邊接觸問題數值分析

Translated title of the thesis: Numerical Analysis of Edge Contact on Silicon Wafer in Epitaxial Growth Process
  • 賴 岳群

Student thesis: Master's Thesis

Abstract

Date of Award2017 Aug 23
Original languageChinese
SupervisorYu-Yun Lin (Supervisor)

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