製程方式對氮化鋁薄膜體聲波諧振器諧振頻率影響之研究

Translated title of the thesis: The Effect of Processing on the Resonant Frequencies of AlN Thin Film Bulk Acoustic Wave Resonators
  • 廖 韋綱

Student thesis: Master's Thesis

Date of Award2017 Aug 15
Original languageChinese
SupervisorBing-Jing Li (Supervisor)

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