製程條件與上電極材料選擇對Metal/LaGdO3/Si金屬-氧化物-半導體電容之電特性研究

Translated title of the thesis: The Effects of Process Condition and Top Electrode Materials on the Electrical Properties of the Metal/LaGdO3/Si Capacitor
  • 黃 孜玗

Student thesis: Master's Thesis

Abstract

Date of Award2018 Jan 16
Original languageChinese
SupervisorCheng-Liang Huang (Supervisor)

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