高膜厚鉬鋁結構於鋁酸製程的蝕刻研究

Translated title of the thesis: Study the high film thickness of Molybdenum-Aluminum structure in Al-acid process
  • 陳 明俊

Student thesis: Master's Thesis

Abstract

Date of Award2018 Feb 12
Original languageChinese
SupervisorJung-Hua Chou (Supervisor)

Cite this

高膜厚鉬鋁結構於鋁酸製程的蝕刻研究
明俊, 陳. (Author). 2018 Feb 12

Student thesis: Master's Thesis