高頻通訊之氮化鋁薄膜體聲波諧振器及濾波器的研製與分析

Translated title of the thesis: Fabrication and Analysis of AlN Thin Film Bulk Acoustic Wave Resonators and Filters for High-Frequency Communication
  • 沈 昱翔

Student thesis: Master's Thesis

Abstract

Date of Award2016 Aug 23
Original languageChinese
SupervisorBing-Jing Li (Supervisor)

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