ALD Temperature Modulation and Extra Post Metal Anneal to Fabricate High Performance P-type MOSFET Device

  • 劉 鴻輝

Student thesis: Master's Thesis

Abstract

Date of Award2017 Aug 11
Original languageEnglish
SupervisorCheng-Chi Tai (Supervisor)

Cite this

ALD Temperature Modulation and Extra Post Metal Anneal to Fabricate High Performance P-type MOSFET Device
鴻輝, 劉. (Author). 2017 Aug 11

Student thesis: Master's Thesis