Applying DOE to Optimizing the BM Line Width

Abstract

This study investigates the stability and reproducibility of the line width of a specified black matrix (BM) in the laboratory experiments in the case-study company It conducts the DMAIC phases from the six sigma methodology to explore the manufacturing process that shapes the line width of the BM It then uses experimental design to identify the factors that impact product characteristics and deploys Response Surface Methodology (RSM) to design the improvement experiment and find the optimal parametric condition The study aims to obtain the optimal parameters decrease the line width variation of the specified BM and improve the process capability The results of this study reveal that the line width of the BM is influenced by three parameters: development temperature exposure intervals and development time By setting the optimal values of these parameters which are are obtained from the Central Composite Design (CCD) of RSM the laboratory experiment is able to to attain better results in terms of the ratios of targeted value standard deviation and Cpk

Date of Award	2019
Original language	English
Supervisor	Chung-Chi Hsieh (Supervisor)