AVM Deployment System with Failover and Load-Balancing Capabilities

Abstract

Virtual Metrology is a method to conjecture manufacturing quality of a process tool based on data sensed from the process tool and without physical metrology operations In recent years Automatic Virtual Metrology (AVM) System has been well developed and the AVM technology has been successfully tested in and transferred to semiconductor thin-film-transistor-liquid-crystal-display (TFT-LCD) and solar industries to monitor the quality of production in real time There has been an increasing demand for providing 24-hour non-interrupted process in manufacturing factories With the purpose of enhancing the overall equipment effectiveness (OEE) a system with high availability (HA) is indispensable This work proposes a framework of VM Administrator with fault-tolerant capability in the case of extraordinary circumstances Moreover VM Administrator shall also be responsible for balancing the high frequency workloads in production as well as coordinating with manufacturing execution system (MES) Finally real data of a practical process tool are applied to validate the feasibility of the proposed framework

Date of Award	2014 Aug 27
Original language	English
Supervisor	Fan-Tien Cheng (Supervisor)