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Development and Application of High-power Impulse Magnetron Sputtering Power Supply
蔡 文信
Student thesis
:
Doctoral Thesis
Abstract
none
Date of Award
2019
Original language
English
Supervisor
Hong-Tzer Yang
(Supervisor)
Cite this
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Development and Application of High-power Impulse Magnetron Sputtering Power Supply
文信, 蔡. (Author).
2019
Student thesis
:
Doctoral Thesis