Development of Micro Low-Frequency Wearable Vibration Energy Harvester by Electrostatic Comb-Drive

Abstract

In the development of wearable device battery life is one of the most urgent problems and harvesting the kinetic or thermal energy into power provides a reliable solution to power supply We proposed a micro electrostatic vibration energy harvester that can transform low frequency human motion in 1-2 Hz into electrical energy The size of electrostatic vibration energy harvester in this thesis is 8mm×8mm×2 054mm the mass the stiffness of spring 0 022 N/m and the natural frequency is 1 664 Hz When the external vibration frequency is 1 664 Hz with amplitude 1200 μm this energy harvester can provide 0 27 μW

Date of Award	2015 Jul 9
Original language	English
Supervisor	Shih-Ming Yang (Supervisor)