Development of porous ZnO nanowire arrays for enhancing piezoelectric nanogenerators

Abstract

This study investigates the piezopotential of porous & non-porous ZnO nanowire arrays and the porous one shows the ultra-high enhancement from COMSOL simulations and experimental results First we growth ZnO seed layer on silicon substrate by sputter in room temperature then growth ZnO NWs by chemical bath deposition method followed by hydrogen annealing to create surface pores and inner pores We use SEM(HITACHI SU8000) to see the morphology including diameter length and porosity then use TEM(JEOL JEM-2100F-CS) to see inner pores and surface roughness From the COMSOL result piezopotential is proportional to porosity both in normal and lateral force which is consistence with AFM measurements

Date of Award	2019
Original language	English
Supervisor	Chuan-Pu Liu (Supervisor)