Explore the efficiency of photoresist stripper using system dynamics

Abstract

This research makes use of the method of system dynamics to inquire into a photoresist stripper recovery rate Because the photoresist stripper uses a procedure complicated and is influenced by many different depletion sources Change these parameters that consume and use a source all will produce the variety to the recovery rate Have the high dynamic state variety，Therefore make use of the system dynamics software Vensim PLE to construct the photoresist stripper model With the use current conditions that imitates a chemicals And is carried on the simulate of each policy by the current conditions，With find out the best chemicals recovery rate method This research puts great emphasis on the photoresists stripper recycle efficiency And analyze three key factors：Adjust the air knife regulator Establish exhaust condenser and use SRS recycle system to increase the recovery rate In addition After carrying out the policy emulation The Stripper recovery rate can promote to 77 6%。

Date of Award	2019
Original language	English
Supervisor	Wei-Tsong Wang (Supervisor)