Investigation into the piezo-gating effect on ZnO and MgZnO thin films

  • 傑 度達

Student thesis: Doctoral Thesis

Abstract

Our work demonstrates a unique device design to investigate the piezo-gating effect on ZnO and MgZnO thin-film Herein we have grown highly c axis oriented crystalline ZnO and MgZnO thin-film on top of SiO2/Si substrate via RF sputtering deposition method In order to investigate the piezo-gating effect we have used top and bottom electrodes It is observed that the presence of an external compressive force induces piezopotential which affects the channel behavior by a redistributing internal charge carrier We have observed nearly ±7% changes in current ratio with and without external force for ZnO thin-film and around 11% for MgZnO which can be attributed to piezo-gating effect To validate the experimental results we have carried out COMSOL Multiphysics Simulations In simulation we have carried out theoretical calculation on ideal ZnO and also get a similar change in current around ±7% We have also achieved a higher gauge factor for piezotronic transistor around 10x103 due to higher current response and low strain value
Date of Award2020
Original languageEnglish
SupervisorChuan-Pu Liu (Supervisor)

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