Preparation of Transparent Conductivity Oxide Thin Films by Atmosphere Micro-Plasma Assisted Ultrasonic Spray Pyrolysis

  • 黃 柏瑋

Student thesis: Doctoral Thesis


Zinc Oxide (ZnO) has similar conductivity and transmittance to Indium Tin Oxide (ITO) used in today's displays but its price is lower It is regarded as an alternative material for the Transparent Conductive Oxide Film (TCO) in many studies In this study zinc chloride was used as the precursor deposited by ultrasonic spray pyrolysis During the process precipitates were formed due to solvent problems and influenced the consistency of the film The solvent was replaced with methanol to improve the precipitation problem Since the intrinsic properties of zinc oxide is not good the aluminum ion is doped to form an aluminum-doped Zinc Oxide film (AZO) to increase its carrier concentration The process temperature of doped aluminum ions need to be increased to improve the crystallinity of the crystal Atmospheric micro-plasma assisted processes are used to reduce process temperatures However the film prepared in this manner has a poor electrical resistivity and it is presumed that the free radicals and reactive oxygen generated by the atmospheric plasma is adsorbed to the film so that oxygen vacancies are lowered resulting in a decrease in free carrier concentration Vacuum annealing heat treatment was used to improve the properties of the film Finally ZnO film with Al-doped concentration of 0 5 at % prepared by micro-plasma-assisted ultrasonic spray pyrolysis was annealed in a vacuum assisted argon atmosphere and the resistivity of TCO film is 5 2 ± 1 1 × 10-3 Ω-cm、transmittance 80% was successfully made
Date of Award2019
Original languageEnglish
SupervisorShih-Chen Shi (Supervisor)

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