Readout Circuit and Chip Design for a Piezoelectric MEMS Accelerometer

Abstract

This thesis presents a readout circuit for a piezoelectric accelerometer The readout circuit includes a current-to-voltage converter and an analog-to-digital converter (ADC) On the design of current-to-voltage converter this work realizes two versions with different structures: conventional transimpedance amplifier (Version Ⅰ) and current mirror-based current-to-voltage converter (Version Ⅱ) Compared with the conventional transimpedance amplifier the power consumption of the proposed current mirror-based current-to-voltage converter is reduced by approximately 10 times without losing sensitivity and linearity In addition compared with other readout circuits this design also adds an analog-to-digital converter so the digital code can be directly transmitted to the succeeding digital processor for further processing The proof-of-concept prototype is fabricated in the 180-nm CMOS process The measurement results of the first chip (Version Ⅰ) show that the linearity of the accelerometer system is 0 9956 the sensitivity is 154 mV/g and the power consumption is 0 435 mW under a 1 8 V supply voltage The measurement results for the second chip (Version Ⅱ) show that the linearity of the accelerometer system is 0 9998 the sensitivity is 142 mV/g and the power consumption is 0 0489 mW under a 1 8 V supply voltage

Date of Award	2020
Original language	English
Supervisor	Soon-Jyh Chang (Supervisor)