The Influence of Transversely Isotropic Materials on Quality Factor of MEMS Resonators

Abstract

In this research we construct a model via numerical method to analyze the dynamic properties of MEMS resonator structure high quality factor is a highly demanded performance in many high resolution high sensitivity and high stability MEMS components At normal pressure the gas trapped in thin gap between cantilever resonator and substrate trapped gas in the gap will be squeezed when resonator vibrate lead to the squeeze film damping this source of damping is one major source of reduce quality factor the gas pressure have to decrease in order to decrease this source of damping the gas pressure Mean while in low pressure rarefied gas the surface accommodation factor must take in to account On the other hand the thermal-elastic damping of transversely isotropic material is another source of damping need to consider because the stress strain behavior of transversely isotropic material is different form normal isotropy material so further intestate is needed Temperature is a important parameter to study because temperature will heavily influence the gas behavior and the material of resonator itself

Date of Award	2019
Original language	English
Supervisor	Wang-Long Li (Supervisor)