Chin-Kai Chang

查看斯高帕斯 (Scopus) 概要

電話886 6 2757575 ext 62179
電子郵件ckchanggs.ncku.edutw

h-index

每年研究成果

學歷

2009 Ph.D., Institute of Applied Mechanics, National Taiwan University
2004 B.S., Mechanical Engineering, National Taiwan University

經歷

2020/02~ Assistant Professor, Department of Mechanical Engineering, National Cheng Kung University, Taiwan.
2018/09~2020/02 Technical Lead, Nano Patterning Technology Division, Taiwan Semiconductor Manufacturing Company.
2013/09~2018/09 Principle Engineer, Nano Patterning Technology Division, Taiwan Semiconductor Manufacturing Company.
2011/09~2012/04 Visiting scholar, Functional Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, Netherlands.
2009/09~2013/09 Researcher, Material and Chemical Research Laboratories, Industrial Technology Research Institute.

研究專長

奈米光學 (Nano-Optics)
微奈米製造技術 (Micro/Nano Fabrication Technology)
光學機構系統 (Opto-Mechanical Systems)

指紋

查看啟用 Chin-Kai Chang 的研究主題。這些主題標籤來自此人的作品。共同形成了獨特的指紋。

1 類似的個人檔案

2 已完成

利用奈米金屬透鏡提升微影解析度和製程穩定度
Chang, C.
21-08-01 → 22-07-31
研究計畫: Research project
利用奈米金屬透鏡的近場和遠場的光學特性於先進光學微影技術
Chang, C.
20-08-01 → 21-07-31
研究計畫: Research project

24 Article
2 Conference contribution
1 Conference article

Improvements in patterning quality and fidelity in plasmonic lithography incorporating optical proximity correction
Chang, C. K. & Chien, H. Y., 2024 7月, 於: Optics and Laser Technology. 174, 110653.
研究成果: Article › 同行評審
2 引文斯高帕斯（Scopus）
Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network
Chang, C. K. & Yang, C. W., 2024 2月 26, 於: Optics Express. 32, 5, p. 8389-8396 8 p.
研究成果: Article › 同行評審

開啟存取
Enhancement of photothermal effect using a hierarchical plasmonic structure
Chang, C. K. & Huang, T. H., 2023 11月 30, 於: Applied Surface Science. 638, 158034.
研究成果: Article › 同行評審
2 引文斯高帕斯（Scopus）
Polarization-switchable focal vortex beam by an Archimedean array
Chang, C. K. & Wei, C. H., 2023 3月 13, 於: Optics Express. 31, 6, p. 9915-9922 8 p.
研究成果: Article › 同行評審

開啟存取
2 引文斯高帕斯（Scopus）
Wavefront engineering based on hybrid plasmonic mode
Chang, C. K. & Yeh, W. T., 2023 8月, 於: Optics and Lasers in Engineering. 167, 107605.
研究成果: Article › 同行評審

張晉愷

個人檔案

學歷

經歷

研究專長

指紋

過去五年中的合作和熱門研究領域

深入探索詳細資料

利用奈米金屬透鏡提升微影解析度和製程穩定度

利用奈米金屬透鏡的近場和遠場的光學特性於先進光學微影技術

Improvements in patterning quality and fidelity in plasmonic lithography incorporating optical proximity correction

Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network

Enhancement of photothermal effect using a hierarchical plasmonic structure

Polarization-switchable focal vortex beam by an Archimedean array

Wavefront engineering based on hybrid plasmonic mode

張 晉愷

個人檔案

學歷

經歷

研究專長

指紋

過去五年中的合作和熱門研究領域

專案

利用奈米金屬透鏡提升微影解析度和製程穩定度

利用奈米金屬透鏡的近場和遠場的光學特性於先進光學微影技術

研究成果

Improvements in patterning quality and fidelity in plasmonic lithography incorporating optical proximity correction

Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network

Enhancement of photothermal effect using a hierarchical plasmonic structure

Polarization-switchable focal vortex beam by an Archimedean array

Wavefront engineering based on hybrid plasmonic mode

張晉愷