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研究成果 1997 2019

篩選
Paper
2003

Effect of Ta2N crystallinity on diffusion barrier properties

Chung, H. C. & Liu, C. P., 2003 一月 1, p. 161-166. 6 p.

研究成果: Paper

Diffusion barriers
Silicon
Crystal orientation
Copper
Annealing

Eletrical and mechanical properies of nitrogen and fluorine incorporated organosilicate glass prepared by plasma enhanced chemical vapor deposition

JangJian, S. K., Liu, C. P., Hwang, W. S., Chen, S. W., Wei, K. H. & Wang, Y. L., 2003 一月 1, p. 188-194. 7 p.

研究成果: Paper

Fluorine
Plasma enhanced chemical vapor deposition
Nitrogen
Glass
Composite films

Growth and characterization of InGaN quantum dots in InGaN/GaN superlattices

Liu, C. P., Chen, R. & Lai, Y. L., 2003 一月 1, p. 16-20. 5 p.

研究成果: Paper

Aluminum Oxide
Superlattices
Metallorganic chemical vapor deposition
Optical devices
Laser modes

Mg doping concentration influenced by the polarity of the GaN layer in InGaN/GaN superlattice structures

Lai, Y. L., Chen, R., Liu, C. P. & Lin, Y. W., 2003 一月 1, p. 174-178. 5 p.

研究成果: Paper

Buffer layers
Electron diffraction
Doping (additives)
Organic Chemicals
Aluminum Oxide

Thickness effect on the diffusion barrier properties of ZrN in Cu/ZrN/Si systems

Chen, C. S., Liu, C. P., Yang, H. G. & Tsao, C. Y. A., 2003 一月 1, p. 146-153. 8 p.

研究成果: Paper

Diffusion barriers
Annealing
Reactive sputtering
Thick films
Magnetron sputtering