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研究成果 1997 2019

篩選
Conference article
2008
2 引文 (Scopus)
ion beams
quantum wells
cathodoluminescence
fabrication
light emitting diodes
2006
3 引文 (Scopus)

Characterization and thermal stability of fluorosilicate glass films deposited by high density plasma chemical vapor deposition with different bias power

Hsiao, W. C., Liu, C-P., Wang, Y. L. & Cheng, Y. L., 2006 三月 1, 於 : Thin Solid Films. 498, 1-2, p. 289-293 5 p.

研究成果: Conference article

fluorosilicates
Plasma density
plasma density
Chemical vapor deposition
Thermodynamic stability
1 引文 (Scopus)
fluorosilicates
Helium
Fluorine
Plasma density
cooling systems
31 引文 (Scopus)

High-selectivity damascene chemical mechanical polishing

Chiu, S. Y., Wang, Y. L., Liu, C. P., Chang, S. C., Hwang, G. J., Feng, M. S. & Chen, C. F., 2006 三月 1, 於 : Thin Solid Films. 498, 1-2, p. 60-63 4 p.

研究成果: Conference article

Chemical mechanical polishing
polishing
Copper
selectivity
copper
20 引文 (Scopus)

Novel slurry solution for dishing elimination in copper process beyond 0.1-μm technology

Chen, K. W., Wang, Y. L., Liu, C-P., Chang, L. & Li, F. Y., 2006 三月 1, 於 : Thin Solid Films. 498, 1-2, p. 50-55 6 p.

研究成果: Conference article

Copper
elimination
copper
Cytidine Monophosphate
Polishing
20 引文 (Scopus)

The influence of magnesium and hydrogen introduction in sputtered zinc oxide thin films

Huang, J. H. & Liu, C. P., 2006 三月 1, 於 : Thin Solid Films. 498, 1-2, p. 152-157 6 p.

研究成果: Conference article

Zinc Oxide
Zinc oxide
zinc oxides
Magnesium
Oxide films
17 引文 (Scopus)
Superlattices
Semiconductor quantum wells
Semiconductor quantum dots
superlattices
polarity
3 引文 (Scopus)

Uniform CoSi2 nano-nucleus formation by oxide mediated silicidation with a Ti capping layer

Chang, J. J., Hsieh, T. E., Liu, C. P. & Wang, Y. L., 2006 三月 1, 於 : Thin Solid Films. 498, 1-2, p. 85-89 5 p.

研究成果: Conference article

Oxides
Annealing
nuclei
oxides
annealing
2004
6 引文 (Scopus)

Evaluation of advanced chemical mechanical planarization techniques for copper damascene interconnect

Chen, K. W., Wang, Y. L., Liu, C. P., Yang, K., Chang, L., Lo, K. Y. & Liu, C. W., 2004 一月 30, 於 : Thin Solid Films. 447-448, p. 531-536 6 p.

研究成果: Conference article

Cytidine Monophosphate
Chemical mechanical polishing
Polishing
Copper
platforms
14 引文 (Scopus)

Fluorine-modified low-k a-SiOC:H composite films prepared by plasma enhanced chemical vapor deposition

JangJean, S. K., Liu, C. P., Wang, Y. L., Hwang, W. S., Tseng, W. T., Chen, S. W. & Lo, K. Y., 2004 一月 30, 於 : Thin Solid Films. 447-448, p. 674-680 7 p.

研究成果: Conference article

Fluorine
Composite films
Plasma enhanced chemical vapor deposition
fluorine
vapor deposition
15 引文 (Scopus)

Moisture resistance and thermal stability of fluorine-incorporation siloxane-based low-dielectric-constant material

Cheng, Y. L., Wang, Y. L., Wu, Y. L., Liu, C. P., Liu, C. W., Lan, J. K., O'Neil, M. L., Ay, C. & Feng, M. S., 2004 一月 30, 於 : Thin Solid Films. 447-448, p. 681-687 7 p.

研究成果: Conference article

moisture resistance
Siloxanes
Fluorine
siloxanes
fluorine
1 引文 (Scopus)

Monitor and eliminate the circular defects in HDP-STI deposition through oxynitride/oxide composite liner

Lan, J. K., Wang, Y. L., Liu, C-P., Lee, W-S., Ay, C., Cheng, Y. L. & Chang, S. C., 2004 一月 30, 於 : Thin Solid Films. 447-448, p. 645-650 6 p.

研究成果: Conference article

Plasma density
oxynitrides
linings
Oxides
plasma density
9 引文 (Scopus)

Study on precipitations of fluorine-doped silicon oxide

Wu, J., Wang, Y. L., Liu, C. P., Chang, S. C., Kuo, C. T. & Ay, C., 2004 一月 30, 於 : Thin Solid Films. 447-448, p. 599-604 6 p.

研究成果: Conference article

Fluorine
Silicon oxides
silicon oxides
Oxide films
fluorine
2003

Characterization of Co-catalyzed multiwalled carbon nanotubes by high-resolution transmission electron microscopy

Wang, C. C., Liu, C-P., Liu, R. M. & Liao, K. H., 2003 七月 25, 於 : Materials Research Society Symposium - Proceedings. 737, p. 703-708 6 p.

研究成果: Conference article

Multiwalled carbon nanotubes (MWCN)
High resolution transmission electron microscopy
Cobalt
carbon nanotubes
cobalt
4 引文 (Scopus)

Quantitative characterization of self-assembled coherent islands

Liu, C-P. & Gibson, J. M., 2003 一月 22, 於 : Thin Solid Films. 424, 1, p. 2-8 7 p.

研究成果: Conference article

Diffraction
Strain relaxation
Heterojunctions
Aspect ratio
Semiconductor materials
Magnetron sputtering
magnetron sputtering
direct current
Nanoparticles
nanoparticles
6 引文 (Scopus)

The relationship between nano-scale Sm211/Sm123 interfaces and superconductivity of Sm-Ba-Cu-O materials

Chen, S. Y., Chen, I. G., Liu, C. P., Hsieh, P. C. & Wu, M. K., 2003 七月 1, 於 : IEEE Transactions on Applied Superconductivity. 13, 2, p. 3180-3183 4 p.

研究成果: Conference article

Superconductivity
Superconducting materials
superconductivity
Particle size
curvature
2002

Morphology evolution of pyramid-like nanostructures on cobalt thin films during deposition by sputtering

Chen, S. W., Wen, J. R., Liu, C. P. & Chen, J. N., 2002 一月 1, 於 : Materials Research Society Symposium - Proceedings. 739, p. 107-112 6 p.

研究成果: Conference article

Cobalt
pyramids
Sputtering
Nanostructures
cobalt
2 引文 (Scopus)
Sputtering
Electric properties
textures
Textures
sputtering
2001
2 引文 (Scopus)
Metallorganic chemical vapor deposition
Semiconductor quantum dots
metalorganic chemical vapor deposition
interruption
quantum dots
2000

Identification of shape transitions in coherent Ge/Si islands using transmission electron microscopy

Liu, C-P., Henstrom, W. L., Cahill, D. G. & Murray Gibson, J., 2000 十二月 11, 於 : Materials Research Society Symposium - Proceedings. 583, p. 137-142 6 p.

研究成果: Conference article

Domes
Transmission electron microscopy
Strain relaxation
transmission electron microscopy
domes

Shape reversal of Ge/Si domes to pyramids via Si-Ge intermixing and strain reduction

Henstrom, W. L., Chuan-Pu, L. I. U. & Murray Gibson, J., 2000 十二月 11, 於 : Materials Research Society Symposium - Proceedings. 583, p. 45-50 6 p.

研究成果: Conference article

Domes
domes
pyramids
gradients
3 引文 (Scopus)

Study on crystal defects in epitaxial GaN film by high-order weak-beam electron microscopy

Wang, S. Q., Liu, C. P. & Ye, H. Q., 2000 一月 1, 於 : Materials Characterization. 44, 4, p. 385-389 5 p.

研究成果: Conference article

Edge dislocations
Crystal defects
Epitaxial films
edge dislocations
Dislocations (crystals)
1999
1 引文 (Scopus)

InAs quantum dot growth by APMOCVD

Yeoh, T. S., Swint, R. B., Coleman, J. J. & Liu, C. P., 1999 一月 1, 於 : LEOS Summer Topical Meeting. p. 31-32 2 p.

研究成果: Conference article

Semiconductor quantum dots
Activation energy
quantum dots
activation energy