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研究成果 1992 2019

  • 427 引文
  • 13 h-指數
  • 36 Article
  • 11 Conference contribution
  • 7 Patent
  • 1 Conference article
2019
Organic light emitting diodes (OLED)
Electrolytes
Copper
light emitting diodes
electrolytes
2018
4 引文 (Scopus)
photometers
absorbers
metals
rejection
quantum efficiency

Visible-blind ultraviolet photodetectors based on NiO/ZnO NRs with poly-(N-vinylcarbazole) intermediate layer

Huang, D. W., Lin, H. P. & Perng, D. C., 2018 一月 1, TechConnect Briefs 2018 - Informatics, Electronics and Microsystems. Laudon, M., Case, F., Romanowicz, B. & Case, F. (編輯). TechConnect, p. 213-216 4 p. (TechConnect Briefs 2018 - Advanced Materials; 卷 4).

研究成果: Conference contribution

Photodetectors
Nanorods
Thin films
Dark currents
Buffer layers
2017
recesses
field effect transistors
flat surfaces
low resistance
high resistance
22 引文 (Scopus)

Enhancement of short-circuit current density in Cu2O/ZnO heterojunction solar cells

Perng, D. C., Hong, M. H., Chen, K. H. & Chen, K. H., 2017 一月 1, 於 : Journal of Alloys and Compounds. 695, p. 549-554 6 p.

研究成果: Article

Short circuit currents
Heterojunctions
Solar cells
Current density
Nanorods
2015
13 引文 (Scopus)
nanorods
photometers
luminous intensity
buffers
dark current
9 引文 (Scopus)
graphene
carbon
annealing
air
furnaces
2014
38 引文 (Scopus)
graphene
copper
nanostructure (characteristics)
diffraction patterns
Raman spectra
3 引文 (Scopus)

Formation of wide band-gap CuInAlS2 thin film and its application to UV Detectors

Perng, D. C., Kao, T. T. & Chang, R. P., 2014 十二月 1, 於 : Thin Solid Films. 572, p. 28-32 5 p.

研究成果: Article

ultraviolet detectors
Ultraviolet detectors
Photodetectors
photometers
Energy gap
7 引文 (Scopus)
Graphite
Bending tests
Graphene
Electric properties
Mechanical properties
2013
8 引文 (Scopus)

Cu2O growth characteristics on an array of ZnO nanorods for the nano-structured solar cells

Perng, D. C., Chen, J. W., Kao, T. T. & Chang, R. P., 2013 九月 25, 於 : Surface and Coatings Technology. 231, p. 261-266 6 p.

研究成果: Article

Nanorods
nanorods
Solar cells
solar cells
plating
5 引文 (Scopus)

Nano-structured Cu(In,Al)Se2 near-infrared photodetectors

Chang, R. P. & Perng, D-C., 2013 二月 1, 於 : Thin Solid Films. 529, p. 238-241 4 p.

研究成果: Article

Photodetectors
Nanowires
photometers
nanowires
Infrared radiation
2012
4 引文 (Scopus)

Electrochemical studies of W corrosion for low resistive contact in the 28 nm technology node

Hsu, C. L., Perng, D. C., Chen, Y. M., Huang, S. M., Li, Y. T., Kung, C. H., Lin, C. H., Yang, Y. R., Lin, C. F., Huang, C. & Wu, J. Y., 2012 一月 6, 於 : Journal of the Electrochemical Society. 159, 2, p. H162-H165

研究成果: Article

corrosion
Corrosion
Tungsten
Chemical mechanical polishing
Potentiodynamic polarization
2 引文 (Scopus)

Monitoring implant anneal by non-contact room temperature photoluminescence

Hong, M. H., Perng, D-C., Jian, S. K. J. & Yoo, W. S., 2012 十二月 1, 於 : ECS Solid State Letters. 1, 5

研究成果: Article

Arc lamps
Photoluminescence
Monitoring
Sheet resistance
Arsenic
2 引文 (Scopus)

Non-contact monitoring of Ge and B diffusion in B-doped epitaxial Si 1-xGex bi-layers on silicon substrates during rapid thermal annealing by multiwavelength Raman spectroscopy

Hong, M. H., Chang, C. W., Perng, D-C., Lee, K. C., Jian, S. K. J., Lee, W. F., Chuang, Y., Fan, Y. T. & Yoo, W. S., 2012 十二月 1, 於 : AIP Advances. 2, 3, 032150.

研究成果: Article

Raman spectroscopy
annealing
silicon
thermal diffusion
wafers
2 引文 (Scopus)

Reliability studies of mo layer deposited on polyimide substrate for CIGS solar cell applications

Perng, D-C., Hung, M. C. & Wang, K. Y., 2012, Program - 38th IEEE Photovoltaic Specialists Conference, PVSC 2012. p. 891-894 4 p. 6317745

研究成果: Conference contribution

Polyimides
Solar cells
Substrates
Annealing
Cracks
14 引文 (Scopus)

Robust ultra-thin RuMo alloy film as a seedless Cu diffusion barrier

Hsu, K. C., Perng, D. C. & Wang, Y. C., 2012 三月 5, 於 : Journal of Alloys and Compounds. 516, p. 102-106 5 p.

研究成果: Article

Diffusion barriers
Leakage currents
Diffraction patterns
Annealing
Ultrathin films
1 引文 (Scopus)
Boron
Silicon
Photoluminescence
Sheet resistance
Annealing
15 引文 (Scopus)

Ultrathin Cr added Ru film as a seedless Cu diffusion barrier for advanced Cu interconnects

Hsu, K. C., Perng, D. C., Yeh, J. B. & Wang, Y. C., 2012 七月 1, 於 : Applied Surface Science. 258, 18, p. 7225-7230 6 p.

研究成果: Article

Diffusion barriers
Diffraction patterns
X ray diffraction
Sheet resistance
High resolution transmission electron microscopy
2011
8 引文 (Scopus)

Effects of post-CMP cleaning on time dependent dielectric breakdown and electro-migration in porous low-kCu interconnects

Hsu, C. L., Perng, D-C., Lin, W. C., Lu, K. T., Tsai, T. C., Huang, C. & Wu, J. Y., 2011 十月 18, 於 : Journal of the Electrochemical Society. 158, 11

研究成果: Article

Cytidine Monophosphate
Electromigration
Electric breakdown
Cleaning
Surface roughness
27 引文 (Scopus)

Formation of CuInAlSe2 film with double graded bandgap using Mo(Al) back contact

Perng, D. C., Chen, J. W. & Wu, C. J., 2011 一月 1, 於 : Solar Energy Materials and Solar Cells. 95, 1, p. 257-260 4 p.

研究成果: Article

Energy gap
Adhesion
Electric fields
Doping (additives)
Glass
11 引文 (Scopus)
Vapor pressure
vapor pressure
Substrates
Selenium
selenium
50 引文 (Scopus)

Nano-structured Cu2O solar cells fabricated on sparse ZnO nanorods

Chen, J. W., Perng, D. C. & Fang, J. F., 2011 八月 1, 於 : Solar Energy Materials and Solar Cells. 95, 8, p. 2471-2477 7 p.

研究成果: Article

Nanorods
Solar cells
Tin oxides
Indium
ITO glass
10 引文 (Scopus)
Conversion efficiency
Nanowires
Heterojunctions
heterojunctions
Solar cells
22 引文 (Scopus)

Near-infrared photodetector with CuIn1-x AlxSe 2 thin film

Chang, R. P. & Perng, D. C., 2011 八月 22, 於 : Applied Physics Letters. 99, 8, 081103.

研究成果: Article

photometers
thin films
photocurrents
infrared spectra
cut-off
2010
2 引文 (Scopus)
Boron
Diffusion barriers
boron
Carbon
carbon
5 引文 (Scopus)

A 3 nm self-forming InOx diffusion barrier for advanced Cu/porous low-k interconnects

Perng, D. C., Hsu, K. C. & Yeh, J. B., 2010 五月 1, 於 : Japanese journal of applied physics. 49, 5 PART 3, p. 05FA041-05FA044

研究成果: Article

Diffusion barriers
X ray photoelectron spectroscopy
photoelectron spectroscopy
Annealing
annealing
8 引文 (Scopus)
Diffusion barriers
Amorphous films
Metallizing
Copper
diffraction

Influences of the substrate structure on the growth of CuInSe2 and In2Se3thin films

Perng, D-C., Tsai, M. S., Wu, P. Y. & Fang, J. F., 2010 十二月 20, Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010. p. 2474-2477 4 p. 5614748. (Conference Record of the IEEE Photovoltaic Specialists Conference).

研究成果: Conference contribution

Substrates
X ray diffraction
Texturing
Surface morphology
Textures
18 引文 (Scopus)

Self-forming AlOx layer as Cu diffusion barrier on porous low-k film

Perng, D. C., Yeh, J. B., Hsu, K. C. & Tsai, S. W., 2010 一月 1, 於 : Thin Solid Films. 518, 6, p. 1648-1652 5 p.

研究成果: Article

Diffusion barriers
Copper
Annealing
copper
annealing
26 引文 (Scopus)

Thermal and Electrical Properties of PVD Ru(P) Film as Cu Diffusion Barrier

Perng, D-C., Hsu, K. C., Tsai, S. W. & Yeh, J. B., 2010 三月 1, 於 : Microelectronic Engineering. 87, 3, p. 365-369 5 p.

研究成果: Article

Diffusion barriers
Physical vapor deposition
Electric properties
Thermodynamic properties
thermodynamic properties
5 引文 (Scopus)

The TDDB failure mode and its engineering study for 45NM and beyond in porous low k dielectrics direct polish scheme

Hsu, C. L., Lu, K. T., Lin, W. C., Lin, J. C., Chen, C. H., Tsai, T. C., Huang, C., Wu, J. Y. & Perng, D. C., 2010 十月 20, 2010 IEEE International Reliability Physics Symposium, IRPS 2010. p. 918-921 4 p. 5488707. (IEEE International Reliability Physics Symposium Proceedings).

研究成果: Conference contribution

Failure modes
Fused silica
Capacitance
Fabrication
Geometry
2 引文 (Scopus)

The TDDB study of post-CMP cleaning effect for L40 direct polished porous low K dielectrics Cu interconnect

Hsu, C. L., Lin, W. C., Hsu, C. W., Lin, J. C., Tsai, T. C., Huang, C. C., Wu, J. Y. & Perng, D. C., 2010 十二月 1, Chemical Mechanical Polishing 11. 10 編輯 p. 99-105 7 p. (ECS Transactions; 卷 33, 編號 10).

研究成果: Conference contribution

Cleaning
Surface roughness
Metals
2009

Copper diffusion barrier properties of a 10 nm W-Mo alloy films on porous SiOC:H

Hsu, K. C., Perng, D. C., Yeh, J. B., Chang, R. P., Fang, J. F. & Huang, C., 2009 十月 19, Advanced Metallization Conference 2008, AMC 2008. p. 313-317 5 p. (Advanced Metallization Conference (AMC)).

研究成果: Conference contribution

Diffusion barriers
Copper
Transmission electron microscopy
Energy dispersive spectroscopy
Thermodynamic properties
3 引文 (Scopus)

Defect study of manufacturing feasible porous low k dielectrics direct polish for 45nm technology and beyond

Hsu, C. L., Fang, J. Y., Yu, A., Lin, J., Huang, C., Wu, J. Y. & Perng, D. C., 2009 十月 1, Proceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009. p. 140-142 3 p. 5090365. (Proceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009).

研究成果: Conference contribution

Industrial Oils
Surface roughness
Defects
Metals
Peeling
2 引文 (Scopus)

Ru/WCoCN as a seedless Cu barrier system for advanced Cu metallization

Perng, D. C., Yeh, J. B. & Hsu, K. C., 2009 十一月 15, 於 : Applied Surface Science. 256, 3, p. 688-692 5 p.

研究成果: Article

Sheet resistance
Metallizing
Leakage currents
Diffraction patterns
Spectrometry
2008
30 引文 (Scopus)

Phosphorous doped Ru film for advanced Cu diffusion barriers

Perng, D. C., Yeh, J. B. & Hsu, K. C., 2008 七月 30, 於 : Applied Surface Science. 254, 19, p. 6059-6062 4 p.

研究成果: Article

Diffusion barriers
Copper
Glass
Ruthenium
Thermodynamic stability
1 引文 (Scopus)

Single mask dual damascene processes

Perng, D-C., Fang, J. F. & Chen, J. W., 2008 三月 1, 於 : Microelectronic Engineering. 85, 3, p. 599-602 4 p.

研究成果: Article

Masks
masks
costs
Chromium
Photoresists
2003
3 引文 (Scopus)

Gas cluster ion beam application to porous low-k dielectrics

Hautala, J., Book, G., White, B., Doughty, C., Perng, D-C. & Kokubo, T., 2003 十二月 1, 於 : Advanced Metallization Conference (AMC). p. 461-467 7 p.

研究成果: Conference article

Ion beams
Gases
Diffusion barriers
Photoresists
Chemical vapor deposition
2000
Aluminum
Capacitance
Carbon
Statistical process control
Copper
1997
2 引文 (Scopus)

Dry etch challenges of 0.25 μm dual damascene structures

Schnabel, R. F., Dobuzinski, D., Wang, F., Perng, D. C., Gambino, J. & Palm, H., 1997 十二月 1, 於 : Vide: Science, Technique et Applications. 53, 283 SUPPL., p. 102-104 3 p.

研究成果: Article

15 引文 (Scopus)

Dry etch challenges of 0.25 μm dual damascene structures

Schnabel, R. F., Dobuzinsky, D., Gambino, J., Muller, K. P., Wang, F., Perng, D. C. & Palm, H., 1997 十一月, 於 : Microelectronic Engineering. 37-38, p. 59-65 7 p.

研究成果: Article

Antireflection coatings
antireflection coatings
Metals
tapering
metals
1994
5 引文 (Scopus)

Miniature electron microscopes for lithography

Feinerman, A. D., Crewe, D. A., Perng, D. C., Spindt, C. A., Schwoebel, P. R. & Crewe, A. V., 1994 十二月 1, Proceedings of SPIE - The International Society for Optical Engineering. Patterson, D. O. (編輯). Publ by Society of Photo-Optical Instrumentation Engineers, p. 262-273 12 p. (Proceedings of SPIE - The International Society for Optical Engineering; 卷 2194).

研究成果: Conference contribution

Elementary particle sources
Electron sources
Electron beam lithography
Charged particles
Lithography
1992
1 引文 (Scopus)

High-throughput electron-beam lithography

Feinerman, A. D., Crewe, D. A., Perng, D-C., Shoaf, S. E. & Crewe, A. V., 1992 十二月 1, Proceedings of SPIE - The International Society for Optical Engineering. Publ by Int Soc for Optical Engineering, p. 78-89 12 p. (Proceedings of SPIE - The International Society for Optical Engineering; 卷 1778).

研究成果: Conference contribution

Electron Beam Lithography
Electron beam lithography
Wafer
High Throughput
Electron microscopes

Micromachined electron source

Crewe, D. A., Perng, D-C., Shoaf, S. E. & Feinerman, A. D., 1992 十二月 1, Proceedings of SPIE - The International Society for Optical Engineering. Publ by Int Soc for Optical Engineering, p. 66-77 12 p. (Proceedings of SPIE - The International Society for Optical Engineering; 卷 1778).

研究成果: Conference contribution

Electron sources
electron sources
Scanning Electron Microscope
Electron microscopes
electron microscopes

Micromachined thermionic emitter

Perng, D. C., Crewe, D. A., Lee, S. B. & Feinerman, A. D., 1992 十二月 1, Proceedings of SPIE - The International Society for Optical Engineering. Publ by Int Soc for Optical Engineering, p. 90-98 9 p. (Proceedings of SPIE - The International Society for Optical Engineering; 卷 1778).

研究成果: Conference contribution

thermionic emitters
Thermal conductivity
filaments
Annealing
Cathode ray tubes
1 引文 (Scopus)

Micromachined thermionic emitters

Perng, D-C., Crewe, D. A. & Feinerman, A. D., 1992 十二月 1, 於 : Journal of Micromechanics and Microengineering. 2, 1, p. 25-30 6 p., 006.

研究成果: Article

Tungsten
Melting
Electron microscopes
Wire
Annealing
21 引文 (Scopus)

Sub-centimeter micromachined electron microscope

Crewe, A. V., Feinerman, A. D., Crewe, D. A., Perng, D-C. & Shoaf, S. E., 1992 一月 1, 於 : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 10, 4, p. 611-616 6 p.

研究成果: Article

Electron microscopes
electron microscopes
Scanning
scanning
grooves
1800

CuInSe(CIS) Thin Film Solar Cell and Method for Making the Same

貢獻的翻譯標題: 銅銦硒系薄膜太陽能電池及其製造方法Perng, D-C., 1800, 專利號 I433328

研究成果: Patent

Thin film solar cell and method for manufacturing the same

貢獻的翻譯標題: 薄膜太陽能電池及其製作方法Perng, D-C., 1800, 專利號 ZL 2011 1 0441126.9

研究成果: Patent