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研究成果 1992 2019

  • 427 引文
  • 13 h-指數
  • 36 Article
  • 11 Conference contribution
  • 7 Patent
  • 1 Conference article
篩選
Conference contribution
2018

Visible-blind ultraviolet photodetectors based on NiO/ZnO NRs with poly-(N-vinylcarbazole) intermediate layer

Huang, D. W., Lin, H. P. & Perng, D. C., 2018 一月 1, TechConnect Briefs 2018 - Informatics, Electronics and Microsystems. Laudon, M., Case, F., Romanowicz, B. & Case, F. (編輯). TechConnect, p. 213-216 4 p. (TechConnect Briefs 2018 - Advanced Materials; 卷 4).

研究成果: Conference contribution

Photodetectors
Nanorods
Thin films
Dark currents
Buffer layers
2012
2 引文 (Scopus)

Reliability studies of mo layer deposited on polyimide substrate for CIGS solar cell applications

Perng, D-C., Hung, M. C. & Wang, K. Y., 2012, Program - 38th IEEE Photovoltaic Specialists Conference, PVSC 2012. p. 891-894 4 p. 6317745

研究成果: Conference contribution

Polyimides
Solar cells
Substrates
Annealing
Cracks
2010

Influences of the substrate structure on the growth of CuInSe2 and In2Se3thin films

Perng, D-C., Tsai, M. S., Wu, P. Y. & Fang, J. F., 2010 十二月 20, Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010. p. 2474-2477 4 p. 5614748. (Conference Record of the IEEE Photovoltaic Specialists Conference).

研究成果: Conference contribution

Substrates
X ray diffraction
Texturing
Surface morphology
Textures
5 引文 (Scopus)

The TDDB failure mode and its engineering study for 45NM and beyond in porous low k dielectrics direct polish scheme

Hsu, C. L., Lu, K. T., Lin, W. C., Lin, J. C., Chen, C. H., Tsai, T. C., Huang, C., Wu, J. Y. & Perng, D. C., 2010 十月 20, 2010 IEEE International Reliability Physics Symposium, IRPS 2010. p. 918-921 4 p. 5488707. (IEEE International Reliability Physics Symposium Proceedings).

研究成果: Conference contribution

Failure modes
Fused silica
Capacitance
Fabrication
Geometry
2 引文 (Scopus)

The TDDB study of post-CMP cleaning effect for L40 direct polished porous low K dielectrics Cu interconnect

Hsu, C. L., Lin, W. C., Hsu, C. W., Lin, J. C., Tsai, T. C., Huang, C. C., Wu, J. Y. & Perng, D. C., 2010 十二月 1, Chemical Mechanical Polishing 11. 10 編輯 p. 99-105 7 p. (ECS Transactions; 卷 33, 編號 10).

研究成果: Conference contribution

Cleaning
Surface roughness
Metals
2009

Copper diffusion barrier properties of a 10 nm W-Mo alloy films on porous SiOC:H

Hsu, K. C., Perng, D. C., Yeh, J. B., Chang, R. P., Fang, J. F. & Huang, C., 2009 十月 19, Advanced Metallization Conference 2008, AMC 2008. p. 313-317 5 p. (Advanced Metallization Conference (AMC)).

研究成果: Conference contribution

Diffusion barriers
Copper
Transmission electron microscopy
Energy dispersive spectroscopy
Thermodynamic properties
3 引文 (Scopus)

Defect study of manufacturing feasible porous low k dielectrics direct polish for 45nm technology and beyond

Hsu, C. L., Fang, J. Y., Yu, A., Lin, J., Huang, C., Wu, J. Y. & Perng, D. C., 2009 十月 1, Proceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009. p. 140-142 3 p. 5090365. (Proceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009).

研究成果: Conference contribution

Industrial Oils
Surface roughness
Defects
Metals
Peeling
1994
5 引文 (Scopus)

Miniature electron microscopes for lithography

Feinerman, A. D., Crewe, D. A., Perng, D. C., Spindt, C. A., Schwoebel, P. R. & Crewe, A. V., 1994 十二月 1, Proceedings of SPIE - The International Society for Optical Engineering. Patterson, D. O. (編輯). Publ by Society of Photo-Optical Instrumentation Engineers, p. 262-273 12 p. (Proceedings of SPIE - The International Society for Optical Engineering; 卷 2194).

研究成果: Conference contribution

Elementary particle sources
Electron sources
Electron beam lithography
Charged particles
Lithography
1992
1 引文 (Scopus)

High-throughput electron-beam lithography

Feinerman, A. D., Crewe, D. A., Perng, D-C., Shoaf, S. E. & Crewe, A. V., 1992 十二月 1, Proceedings of SPIE - The International Society for Optical Engineering. Publ by Int Soc for Optical Engineering, p. 78-89 12 p. (Proceedings of SPIE - The International Society for Optical Engineering; 卷 1778).

研究成果: Conference contribution

Electron Beam Lithography
Electron beam lithography
Wafer
High Throughput
Electron microscopes

Micromachined electron source

Crewe, D. A., Perng, D-C., Shoaf, S. E. & Feinerman, A. D., 1992 十二月 1, Proceedings of SPIE - The International Society for Optical Engineering. Publ by Int Soc for Optical Engineering, p. 66-77 12 p. (Proceedings of SPIE - The International Society for Optical Engineering; 卷 1778).

研究成果: Conference contribution

Electron sources
electron sources
Scanning Electron Microscope
Electron microscopes
electron microscopes

Micromachined thermionic emitter

Perng, D. C., Crewe, D. A., Lee, S. B. & Feinerman, A. D., 1992 十二月 1, Proceedings of SPIE - The International Society for Optical Engineering. Publ by Int Soc for Optical Engineering, p. 90-98 9 p. (Proceedings of SPIE - The International Society for Optical Engineering; 卷 1778).

研究成果: Conference contribution

thermionic emitters
Thermal conductivity
filaments
Annealing
Cathode ray tubes