• 2202 引文
  • 27 h-指數
1983 …2019
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研究成果 1983 2019

2013

預測模型之建模樣本的篩選方法

Cheng, F-T., 2013 六月 26, 專利號 ZL 2012 1 0453644.7

研究成果: Patent

2012

A dual-forecast scheme for production output with paired/unpaired WIP data

Yang, H. C., Tsai, T. H., Chao, C. Y., Hung, M. H. & Cheng, F. T., 2012 十二月 1, 2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012. p. 581-586 6 p. 6386467. (IEEE International Conference on Automation Science and Engineering).

研究成果: Conference contribution

Production control
Outsourcing
Supply chains
Semiconductor materials
Control systems

ADVANCED PROCESS CONTROL SYSTEM AND METHOD UTILIZING VIRTUAL METROLOGY WITH RELIANCE INDEX

貢獻的翻譯標題: 應用具信心指標之虛擬量測的先進製程控制機制Cheng, F-T., 2012 二月 16, 專利號 特許5292602

研究成果: Patent

Process control
Control systems
Feedback
Controllers
Processing

ADVANCED PROCESS CONTROL SYSTEM AND METHOD UTILIZING VIRTUAL METROLOGY WITH RELIANCE INDEX

貢獻的翻譯標題: 使用具有信心指標的虛擬量測的先進工藝控制系統與方法Cheng, F-T., 2012 三月 14, 專利號 1205265

研究成果: Patent

ADVANCED PROCESS CONTROL SYSTEM AND METHOD UTILIZING VIRTUAL METROLOGY WITH RELIANCE INDEX

貢獻的翻譯標題: 應用具信心指標之虛擬量測的先進製程控制機制Cheng, F-T., 2012 二月 2, 專利號 8688256

研究成果: Patent

Process control
Control systems
Controllers
Gaging
Patents and inventions

ADVANCED PROCESS CONTROL SYSTEM AND METHOD UTILIZING VIRTUAL METROLOGY WITH RELIANCE INDEX

貢獻的翻譯標題: 應用具信心指標之虛擬量測的先進製程控制機制Cheng, F-T., 2012 二月 10, 專利號 10-1335896

研究成果: Patent

Process control
Control systems
Gain control
Patents and inventions
Merging

A key parameter analysis-and-selection system "eProcessKey"

Kao, C. A., Cheng, C. H. & Cheng, F-T., 2012 十二月 20, 2012 e-Manufacturing and Design Collaboration Symposium, eMDC 2012. 6338423. (2012 e-Manufacturing and Design Collaboration Symposium, eMDC 2012).

研究成果: Conference contribution

Design of experiments
Engineers

An optimal LED bin allocation system based on multi-level integer programming method

Yang, H. C., Tsai, T. H., Chen, H. W. & Cheng, F-T., 2012 一月 1, 2012 IEEE International Conference on Industrial Engineering and Engineering Management, IEEM 2012. IEEE Computer Society, p. 1223-1227 5 p. 6837938. (IEEE International Conference on Industrial Engineering and Engineering Management).

研究成果: Conference contribution

Integer programming
Bins
Light emitting diodes
Inventory control
Display devices
9 引文 (Scopus)

A novel automatic virtual metrology system architecture for TFT-LCD industry based on main memory database

Hung, M. H., Tsai, W. H., Yang, H. C., Kao, Y. J. & Cheng, F-T., 2012 八月 1, 於 : Robotics and Computer-Integrated Manufacturing. 28, 4, p. 559-568 10 p.

研究成果: Article

Metrology
System Architecture
Liquid crystal displays
Industry
Data storage equipment

A virtual-metrology-based machining state conjecture system

Yang, H. C., Tieng, H., Li, Y. Y., Hung, M. H. & Cheng, F. T., 2012 十月 5, AIM 2012 - 2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Conference Digest. p. 462-466 5 p. 6265901. (IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM).

研究成果: Conference contribution

Machining
Controllers
Genetic algorithms
Control systems
1 引文 (Scopus)
Production control
Electronic data interchange
Liquid crystal displays
Control systems
Planning
54 引文 (Scopus)

Developing an automatic virtual metrology system

Cheng, F. T., Huang, H. C. & Kao, C. A., 2012 一月 1, 於 : IEEE Transactions on Automation Science and Engineering. 9, 1, p. 181-188 8 p., 6051498.

研究成果: Article

Industrial plants
Semiconductor materials
Thin film transistors
Liquid crystal displays
Optoelectronic devices
12 引文 (Scopus)

Development of a cloud-computing-based equipment monitoring system for machine tool industry

Hung, M. H., Lin, Y. C., Quoc Huy, T., Yang, H. C. & Cheng, F. T., 2012 十二月 1, 2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012. p. 962-967 6 p. 6386500. (IEEE International Conference on Automation Science and Engineering).

研究成果: Conference contribution

Cloud computing
Machine tools
Graphical user interfaces
Monitoring
Industry
9 引文 (Scopus)

Development of an AVM System Implementation Framework

Hung, M. H., Chen, C. F., Huang, H. C., Yang, H. C. & Cheng, F. T., 2012 一月 1, 於 : IEEE Transactions on Semiconductor Manufacturing. 25, 4, p. 598-613 16 p.

研究成果: Article

metrology
industrial plants
Industrial plants
Thin film transistors
Liquid crystal displays
13 引文 (Scopus)

Dynamic-moving-window scheme for virtual-metrology model refreshing

Wu, W. M., Cheng, F-T. & Kong, F. W., 2012 五月 11, 於 : IEEE Transactions on Semiconductor Manufacturing. 25, 2, p. 238-246 9 p., 6126059.

研究成果: Article

metrology
experiment design
predictions
Design of experiments
resources
4 引文 (Scopus)

Engineering chain: A novel semiconductor engineering collaboration model

Cheng, F. T., Chen, Y. L. & Chang, J. Y. C., 2012 八月 13, 於 : IEEE Transactions on Semiconductor Manufacturing. 25, 3, p. 394-407 14 p., 6117097.

研究成果: Article

integrated circuits
engineering
Semiconductor materials
management systems
cycles
1 引文 (Scopus)

New remote monitoring and control system architectures based on cloud computing

Cheng, J. Y., Hung, M. H., Lin, S. S. & Cheng, F-T., 2012 十一月 26, Advanced Manufacturing Focusing on Multi-Disciplinary Technologies. p. 312-329 18 p. (Advanced Materials Research; 卷 579).

研究成果: Conference contribution

Cloud computing
Control systems
Monitoring
Zigbee
Managers
1 引文 (Scopus)

Preliminary study of a dynamic-moving-window scheme for virtual-metrology model refreshing

Wu, W. M., Cheng, F-T. & Hung, M. H., 2012 一月 1, 2012 IEEE International Conference on Robotics and Automation, ICRA 2012. Institute of Electrical and Electronics Engineers Inc., p. 5044-5049 6 p. 6224633. (Proceedings - IEEE International Conference on Robotics and Automation).

研究成果: Conference contribution

Design of experiments

Refinement of kernel and functional mechanisms for automatic virtual metrology system

Hung, M. H., Chen, C. F., Lin, Y. C., Chou, M. Y. & Cheng, F. T., 2012, AIM 2012 - 2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Conference Digest. p. 472-477 6 p. 6265954

研究成果: Conference contribution

Managers
Liquid crystal displays
Communication
Testing
Industry
1 引文 (Scopus)

Virtual-metrology-based FDC scheme

Hsieh, Y. S., Cheng, F. T. & Yang, H. C., 2012 十二月 1, 2012 IEEE International Conference on Automation Science and Engineering: Green Automation Toward a Sustainable Society, CASE 2012. p. 80-85 6 p. 6386371. (IEEE International Conference on Automation Science and Engineering).

研究成果: Conference contribution

Fault detection
Statistical process control
Failure analysis
Monitoring
2011
30 引文 (Scopus)

Automatic data quality evaluation for the AVM system

Huang, Y. T. & Cheng, F. T., 2011 八月 1, 於 : IEEE Transactions on Semiconductor Manufacturing. 24, 3, p. 445-454 10 p., 5766761.

研究成果: Article

metrology
evaluation
Thin film transistors
Liquid crystal displays
Principal component analysis
30 引文 (Scopus)

Benefit model of virtual metrology and integrating AVM into MES

Cheng, F. T., Chang, J. Y. C., Huang, H. C., Kao, C. A., Chen, Y. L. & Peng, J. L., 2011 五月 1, 於 : IEEE Transactions on Semiconductor Manufacturing. 24, 2, p. 261-272 12 p., 5682063.

研究成果: Article

metrology
manufacturing
Semiconductor materials
inspection
Inspection

Manufacturing execution system with virtual-metrology capabilities and manufacturing system

貢獻的翻譯標題: 具有虛擬量測功能的製造執行系統與製造系統Cheng, F-T., 2011 十一月 23, 專利號 1464514

研究成果: Patent

Manufacturing execution system with virtual-metrology capabilities and manufacturing system including the same

貢獻的翻譯標題: 具有虛擬量測功能的製造執行系統與製造系統Cheng, F-T., 2011 十月 13, 專利號 8983644

研究成果: Patent

Managers
Controllers
Statistical process control
Middleware
Control systems
8 引文 (Scopus)

Preliminary study of run-to-run control utilizing virtual metrology with reliance index

Kao, C. A., Cheng, F. T. & Wu, W. M., 2011 十二月 5, 2011 IEEE International Conference on Automation Science and Engineering, CASE 2011. p. 256-261 6 p. 6042446. (IEEE International Conference on Automation Science and Engineering).

研究成果: Conference contribution

Feedback
Gages
Process control
Semiconductor materials
4 引文 (Scopus)

Run-to-run control utilizing the AVM system in the solar industry

Lin, L. R., Chiu, Y. C., Mo, W. C., Kao, C. A., Liu, T. M., Zeng, D. L. & Cheng, F-T., 2011 十二月 22, 2011 e-Manufacturing and Design Collaboration Symposium and International Symposium on Semiconductor Manufacturing, eMDC and ISSM 2011. 6086044. (IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings).

研究成果: Conference contribution

Industry
Plasma enhanced chemical vapor deposition
Feedback
Gages
Solar cells
15 引文 (Scopus)

Selection schemes of dual virtual-metrology outputs for enhancing prediction accuracy

Wu, W. M., Cheng, F-T., Lin, T. H., Zeng, D. L. & Chen, J. F., 2011 四月 1, 於 : IEEE Transactions on Automation Science and Engineering. 8, 2, p. 311-318 8 p., 5634122.

研究成果: Article

Neural networks
Liquid crystal displays
Backpropagation
Industrial plants
Chemical vapor deposition

Virtual production control system and method and computer program product thereof

貢獻的翻譯標題: 虛擬生產管制系統與方法及其電腦程式產品Cheng, F-T., 2011 二月 17, 專利號 8515793

研究成果: Patent

Production control
Computer program listings
Control systems
Freight transportation
Integer programming

Welcome remarks

Luo, R. C. & Cheng, F-T., 2011 九月 9, 於 : Proceedings of the World Congress on Intelligent Control and Automation (WCICA). 1 p., 5970757.

研究成果: Editorial

2010
12 引文 (Scopus)

Advanced E-manufacturing model: The significance of large-scale, distributed, and object-oriented systems

Cheng, F-T., Tsai, W. H., Wang, T. L., Yung-Cheng Chang, J. & Su, Y. C., 2010 三月 1, 於 : IEEE Robotics and Automation Magazine. 17, 1, p. 71-84 14 p., 5430394.

研究成果: Article

Productivity
Production platforms
Decision making
Semiconductor materials
Industry
4 引文 (Scopus)

An efficient data exchange scheme for semiconductor engineering chain management system

Hunga, M. H., Wu, S. W., Wang, T. L., Cheng, F-T. & Feng, Y. Y., 2010 一月 1, 於 : Robotics and Computer-Integrated Manufacturing. 26, 5, p. 507-516 10 p.

研究成果: Article

Data Exchange
Electronic data interchange
Semiconductors
Semiconductor materials
Engineering
3 引文 (Scopus)

Configuring AVM as a MES componConfiguring AVM as a MES component

Cheng, F. T., Chang, J. Y. C., Kao, C. A., Chen, Y. L. & Peng, J. L., 2010 十月 11, 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2010. p. 226-231 6 p. 5551454. (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings).

研究成果: Conference contribution

Inspection
Semiconductor materials
Sampling
Monitoring
Process monitoring
2 引文 (Scopus)

Developing a dual-stage indirect virtual metrology architecture

Tsai, W. H., Cheng, F-T., Wu, W. M. & Lin, T. H., 2010 八月 26, 2010 IEEE International Conference on Robotics and Automation, ICRA 2010. p. 2107-2112 6 p. 5509719. (Proceedings - IEEE International Conference on Robotics and Automation).

研究成果: Conference contribution

Processing
Liquid crystal displays
Optoelectronic devices
Chemical vapor deposition
Industry
6 引文 (Scopus)

Development of an automatic virtual metrology framework for TFT-LCD industry

Hung, M. H., Huang, H. C., Yang, H. C. & Cheng, F. T., 2010 十一月 17, 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010. p. 879-884 6 p. 5584541. (2010 IEEE International Conference on Automation Science and Engineering, CASE 2010).

研究成果: Conference contribution

Liquid crystal displays
Industry
Graphical user interfaces
Interfaces (computer)
Industrial plants

Erratum: Advanced E-Manufacturing Model (IEEE Robotics & Automation Magazine ((2010) 17:1 (7184))

Cheng, F. T., Tsai, W. H., Wang, T. L., Yung-Cheng, J. C. & Su, Y. C., 2010 九月 1, 於 : IEEE Robotics and Automation Magazine. 17, 3, 1 p., 5569033.

研究成果: Comment/debate

Robotics
Automation
4 引文 (Scopus)

Virtual production control system

Yang, H. C., Chen, Y. L., Hung, M. H. & Cheng, F. T., 2010 十一月 17, 2010 IEEE International Conference on Automation Science and Engineering, CASE 2010. p. 984-989 6 p. 5584297. (2010 IEEE International Conference on Automation Science and Engineering, CASE 2010).

研究成果: Conference contribution

Production control
Control systems
Integer programming
Petri nets
Monitoring

檢測產品品質超規與評估產品實際量測值的方法

Cheng, F-T., 2010 六月 16, 專利號 ZL 2008 1 0181649.2

研究成果: Patent

2009

Advanced studies of selection schemes for dual virtual-metrology outputs

Wu, W. M., Cheng, F-T., Lin, T. H., Zeng, D. L., Chen, J. F. & Hung, M. H., 2009 十一月 12, 2009 IEEE International Conference on Automation Science and Engineering, CASE 2009. p. 421-426 6 p. 5234137. (2009 IEEE International Conference on Automation Science and Engineering, CASE 2009).

研究成果: Conference contribution

Neural networks
Liquid crystal displays
Backpropagation
Chemical vapor deposition
8 引文 (Scopus)

Developing a product quality fault detection scheme

Huang, Y. T., Cheng, F. T. & Hung, M. H., 2009 十一月 2, 2009 IEEE International Conference on Robotics and Automation, ICRA '09. p. 927-932 6 p. 5152474. (Proceedings - IEEE International Conference on Robotics and Automation).

研究成果: Conference contribution

Fault detection
Sampling
Liquid crystal displays
Industrial plants
Servers
2 引文 (Scopus)
Electronic data interchange
Service oriented architecture (SOA)
Interoperability
Data integration
Web services
34 引文 (Scopus)

NN-based key-variable selection method for enhancing virtual metrology accuracy

Lin, T. H., Cheng, F-T., Wu, W. M., Kao, C. A., Ye, A. J. & Chang, F. C., 2009 二月 1, 於 : IEEE Transactions on Semiconductor Manufacturing. 22, 1, p. 204-211 8 p., 4773490.

研究成果: Article

metrology
Neural networks
regression analysis
Recurrent neural networks
Backpropagation

System and method for automatic virtual metrology

貢獻的翻譯標題: 全自動化型虛擬量測的伺服器與系統及方法Cheng, F-T., 2009 十一月 26, 專利號 8095484

研究成果: Patent

data quality
metrology
method
similarity index
index

System and method for automatic virtual metrology

貢獻的翻譯標題: 全自動化型虛擬量測的伺服器與系統及方法Cheng, F-T., 2009 七月 30, 專利號 10-1098037

研究成果: Patent

data quality
method
metrology
similarity index
index

System and method for automatic virtual metrology

貢獻的翻譯標題: 全自動化型虛擬量測的伺服器與系統及方法Cheng, F-T., 2009 一月 27, 專利號 特許4914457

研究成果: Patent

自動虛擬計量的系統及方法

Cheng, F-T., 2009 十二月 9, 專利號 CN101598754B

研究成果: Patent

2008
42 引文 (Scopus)

Accuracy and real-time considerations for implementing various virtual metrology algorithms

Su, Y. C., Lin, T. H., Cheng, F-T. & Wu, W. M., 2008 八月 1, 於 : IEEE Transactions on Semiconductor Manufacturing. 21, 3, p. 426-434 9 p., 4589025.

研究成果: Article

metrology
Process control
wafers
requirements
Recurrent neural networks
5 引文 (Scopus)

A novel key-variable sifting algorithm for virtual metrology

Lin, T. H., Cheng, F-T., Ye, A. J., Wu, W. M. & Hung, M. H., 2008 九月 18, 2008 IEEE International Conference on Robotics and Automation, ICRA 2008. p. 3636-3641 6 p. 4543768. (Proceedings - IEEE International Conference on Robotics and Automation).

研究成果: Conference contribution

Neural networks
Recurrent neural networks
Backpropagation
Etching
Semiconductor materials
1 引文 (Scopus)
Recovery
Distributed computer systems
Computer system recovery
Software architecture
Availability
10 引文 (Scopus)

Automatic virtual metrology system design and implementation

Huang, Y. T., Huang, H. C., Cheng, F. T., Liao, T. S. & Chang, F. C., 2008 十一月 3, 4th IEEE Conference on Automation Science and Engineering, CASE 2008. p. 223-229 7 p. 4626524. (4th IEEE Conference on Automation Science and Engineering, CASE 2008).

研究成果: Conference contribution

Systems analysis
Servers
Fans
5 引文 (Scopus)

Developing a selection scheme for dual virtual-metrology outputs

Wu, W. M., Cheng, F. T., Zeng, D. L., Lin, T. H. & Chen, J. F., 2008 十一月 3, 4th IEEE Conference on Automation Science and Engineering, CASE 2008. p. 230-235 6 p. 4626525. (4th IEEE Conference on Automation Science and Engineering, CASE 2008).

研究成果: Conference contribution

Neural networks
Liquid crystal displays
Backpropagation
Chemical vapor deposition