• 2202 引文
  • 27 h-指數
1983 …2019
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研究成果 1983 2019

2008
1 引文 (Scopus)

Development of a dual-stage virtual metrology architecture for TFT-LCD manufacturing

Su, Y. C., Tsai, W. H., Cheng, F. T. & Wu, W. M., 2008 九月 18, 2008 IEEE International Conference on Robotics and Automation, ICRA 2008. p. 3630-3635 6 p. 4543767. (Proceedings - IEEE International Conference on Robotics and Automation).

研究成果: Conference contribution

Thin film transistors
Liquid crystal displays
Processing
Chemical vapor deposition
14 引文 (Scopus)

Development of an Interface C framework for semiconductor e-Diagnostics systems

Hung, M. H., Wang, T. L., Hsu, F. Y. & Cheng, F-T., 2008 六月 1, 於 : Robotics and Computer-Integrated Manufacturing. 24, 3, p. 370-383 14 p.

研究成果: Article

Semiconductors
Diagnostics
Semiconductor materials
Interoperability
XML

Dual-phase virtual metrlogy method

貢獻的翻譯標題: 雙階段虛擬量測方法Cheng, F-T., 2008 十二月 18, 專利號 4584295

研究成果: Patent

Tuning

Dual-phase virtual metrlogy method

貢獻的翻譯標題: 雙階段虛擬量測方法Cheng, F-T., 2008 十二月 11, 專利號 7603328

研究成果: Patent

Tuning

Dual-phase virtual metrology method

貢獻的翻譯標題: 雙階段虛擬量測方法Cheng, F-T., 2008 十二月 10, 專利號 823284

研究成果: Patent

55 引文 (Scopus)

Evaluating reliance level of a virtual metrology system

Cheng, F. T., Chen, Y. T., Su, Y. C. & Zeng, D. L., 2008 二月 1, 於 : IEEE Transactions on Semiconductor Manufacturing. 21, 1, p. 92-102 11 p.

研究成果: Article

metrology
Semiconductor materials
Gaging
Foundries
Liquid crystal displays
2007
75 引文 (Scopus)

A novel virtual metrology scheme for predicting CVD thickness in semiconductor manufacturing

Hung, M. H., Lin, T. H., Cheng, F-T. & Lin, R. C., 2007 六月 1, 於 : IEEE/ASME Transactions on Mechatronics. 12, 3, p. 308-316 9 p.

研究成果: Article

Chemical vapor deposition
Semiconductor materials
Neural networks
Backpropagation
Defects
1 引文 (Scopus)

Development of a dual-phase virtual metrology scheme

Cheng, F. T., Huang, H. C. & Kao, C. A., 2007 十二月 1, Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007. p. 270-275 6 p. 4341679. (Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007).

研究成果: Conference contribution

Liquid crystal displays
Glass
Semiconductor materials
Gages
Process control
14 引文 (Scopus)

Development of a generic virtual metrology framework

Huang, H. C., Su, Y. C., Cheng, F. T. & Jian, J. M., 2007 十二月 1, Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007. p. 282-287 6 p. 4341746. (Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007).

研究成果: Conference contribution

Process control
Software engineering
Testing
Software testing
Planning
Costs
60 引文 (Scopus)

Dual-phase virtual metrology scheme

Cheng, F. T., Huang, H. C. & Kao, C. A., 2007 十一月 1, 於 : IEEE Transactions on Semiconductor Manufacturing. 20, 4, p. 566-571 6 p., 4369327.

研究成果: Article

metrology
wafers
Thin film transistors
Liquid crystal displays
Glass
Mechatronics
7 引文 (Scopus)

Implementation considerations of various virtual metrology algorithms

Su, Y. C., Lin, T. H., Cheng, F-T. & Wu, W. M., 2007, Proceedings of the 3rd IEEE International Conference on Automation Science and Engineering, IEEE CASE 2007. p. 276-281 6 p. 4341740

研究成果: Conference contribution

Process control
Recurrent neural networks
Liquid crystal displays
Backpropagation
Semiconductor materials
8 引文 (Scopus)

Method for evaluating reliance level of a virtual metrology system

Cheng, F. T., Chen, Y. T., Su, Y. C. & Zeng, D. L., 2007 十一月 27, 2007 IEEE International Conference on Robotics and Automation, ICRA'07. p. 1590-1596 7 p. 4209315. (Proceedings - IEEE International Conference on Robotics and Automation).

研究成果: Conference contribution

Semiconductor materials
Gaging
Foundries
Liquid crystal displays

Method for evaluating reliance level of a virtual metrology system in product manufacturing

貢獻的翻譯標題: 生產製程之虛擬量測系統之信心度的評估方法Cheng, F-T., 2007 十二月 6, 專利號 7593912

研究成果: Patent

Gaging
4 引文 (Scopus)

Novel semiconductor business model - Engineering chain for the semiconductor industry

Chang, J. Y. C., Cheng, F-T. & Wang, T. L., 2007 十一月 27, 2007 IEEE International Conference on Robotics and Automation, ICRA'07. p. 1597-1602 6 p. 4209316. (Proceedings - IEEE International Conference on Robotics and Automation).

研究成果: Conference contribution

Semiconductor materials
Industry
Foundries
Consumer products
Integrated circuit design
2006
48 引文 (Scopus)

A processing quality prognostics scheme for plasma sputtering in TFT-LCD manufacturing

Su, Y. C., Hung, M. H., Cheng, F-T. & Chen, Y. T., 2006 五月 1, 於 : IEEE Transactions on Semiconductor Manufacturing. 19, 2, p. 183-193 11 p.

研究成果: Article

Liquid crystal displays
Sputtering
manufacturing
sputtering
Plasmas
24 引文 (Scopus)

A virtual metrology scheme for predicting CVD thickness in semiconductor manufacturing

Lin, T. H., Hung, M. H., Lin, R. C. & Cheng, F. T., 2006 十二月 27, Proceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006. p. 1054-1059 6 p. 1641849. (Proceedings - IEEE International Conference on Robotics and Automation; 卷 2006).

研究成果: Conference contribution

Chemical vapor deposition
Semiconductor materials
Neural networks
Monitoring
Defects
15 引文 (Scopus)

Importance of data quality in virtual metrology

Huang, Y. T., Cheng, F-T. & Chen, Y. T., 2006 十二月 1, IECON 2006 - 32nd Annual Conference on IEEE Industrial Electronics. p. 3727-3732 6 p. 4153229. (IECON Proceedings (Industrial Electronics Conference)).

研究成果: Conference contribution

Chemical vapor deposition
Cleaning
Data reduction
Semiconductor materials
Defects
35 引文 (Scopus)

Intelligent prognostics system design and implementation

Su, Y. C., Cheng, F. T., Hung, M. H. & Huang, H. C., 2006 五月 1, 於 : IEEE Transactions on Semiconductor Manufacturing. 19, 2, p. 195-206 12 p.

研究成果: Article

Intelligent systems
systems engineering
Systems analysis
Liquid crystal displays
industrial plants
3 引文 (Scopus)

Manufacturability of multivariate applications in the semiconductor industry

Jonathan, C. Y. C. & Cheng, F. T., 2006 一月 1, 2006 IEEE International Conference on Automation Science and Engineering, CASE. Institute of Electrical and Electronics Engineers Inc., p. 230-235 6 p. 4120351. (2006 IEEE International Conference on Automation Science and Engineering, CASE).

研究成果: Conference contribution

Semiconductor materials
Industry
Fault detection
Productivity
Control equipment
15 引文 (Scopus)

Multivariate simulation assessment for virtual metrology

Chen, Y. T., Yang, H. C. & Cheng, F. T., 2006 十二月 27, Proceedings 2006 IEEE International Conference on Robotics and Automation, ICRA 2006. p. 1048-1053 6 p. 1641848. (Proceedings - IEEE International Conference on Robotics and Automation; 卷 2006).

研究成果: Conference contribution

Probability distributions
Sensitivity analysis
Neural networks
Costs
Monte Carlo simulation
2005
7 引文 (Scopus)

Application cluster service scheme for near-zero-downtime services

Cheng, F-T., Wu, S. L., Tsai, P. Y., Chung, Y. T. & Yang, H. C., 2005 十二月 1, Proceedings of the 2005 IEEE International Conference on Robotics and Automation. p. 4062-4067 6 p. 1570743. (Proceedings - IEEE International Conference on Robotics and Automation; 卷 2005).

研究成果: Conference contribution

Recovery
Distributed computer systems
Computer system recovery
Degradation
52 引文 (Scopus)

Application development of virtual metrology in semiconductor industry

Jonathan, C. Y. C. & Cheng, F-T., 2005 十二月 1, IECON 2005: 31st Annual Conference of IEEE Industrial Electronics Society. p. 124-129 6 p. 1568891. (IECON Proceedings (Industrial Electronics Conference); 卷 2005).

研究成果: Conference contribution

Semiconductor materials
Industry
Quality assurance
Foundries
Data acquisition

A secure collaborative e-Diagnostics framework for semiconductor factories

Hung, M. H., Hsu, F. Y., Wang, T. L., Cheng, F-T., Lai, R. & Huang, T., 2005 十二月 1, Proceedings of the 2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005. p. 185-190 6 p. 1506766. (Proceedings of the 2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005; 卷 2005).

研究成果: Conference contribution

Industrial plants
Availability
Semiconductor materials
Security of data
Web services
2 引文 (Scopus)

Design and implementation of an intelligent prognostics system

Su, Y. C., Cheng, F. T., Hung, M. H., Lin, Y. C. & Lin, R. C., 2005 十二月 1, Proceedings of the 2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005. p. 273-278 6 p. 1506781. (Proceedings of the 2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005; 卷 2005).

研究成果: Conference contribution

Intelligent systems
Liquid crystal displays
Industrial plants
Semiconductor materials
Maintainability

Development of a data pre-processing scheme and pluggable application modules for an intelligent equipment prognostics system

Su, Y. C., Hung, M. H., Cheng, F-T. & Lee, T. P., 2005 十二月 1, Proceedings - Thirteenth International Symposium on Temporal Representation and Reasoning, TIME 2006. p. 38-43 6 p. 1560349. (2005 3rd IEEE International Conference on Industrial Informatics, INDIN; 卷 2005).

研究成果: Conference contribution

Processing
Pulse amplitude modulation
Graphical user interfaces
Liquid crystal displays
User interfaces
50 引文 (Scopus)
web services
Web services
manufacturing
industries
Semiconductor materials
5 引文 (Scopus)

Engineering-chain requirements for semiconductor industry

Cheng, J. C. Y. & Cheng, F-T., 2005 十二月 1, Proceedings of the 2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005. p. 381-386 6 p. 1506799. (Proceedings of the 2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005; 卷 2005).

研究成果: Conference contribution

Semiconductor materials
Industry
Microelectronics
Foundries
Electronic data interchange
5 引文 (Scopus)

Framework development of an engineering-chain-management-system for the semiconductor industry

Chang, J. Y. C. & Cheng, F. T., 2005 十二月 1, Proceedings - Thirteenth International Symposium on Temporal Representation and Reasoning, TIME 2006. p. 306-311 6 p. 1560394. (2005 3rd IEEE International Conference on Industrial Informatics, INDIN; 卷 2005).

研究成果: Conference contribution

Semiconductor materials
Industry
Foundries
Microelectronics
Supply chains

Generic embedded device and mechanism thereof for various intelligent-maintenance applications

貢獻的翻譯標題: 可擷取和傳送客製化應用之資訊的通用型嵌入式裝置與方法Cheng, F-T., 2005 一月 27, 專利號 7162394

研究成果: Patent

Intranets
Patents and inventions
Internet
Communication
6 引文 (Scopus)
Gravitation
Point contacts
Motion planning
Compensation and Redress

Method for providing fault-tolerant application cluster service

貢獻的翻譯標題: 提供具容錯能力之應用程式叢集服務的方法Cheng, F-T., 2005 十月 27, 專利號 7457236

研究成果: Patent

Recovery
Fault detection

Quality prognostics system and method for manufacturing processes

貢獻的翻譯標題: 生產製程之品質預測系統與方法Cheng, F-T., 2005 十二月 29, 專利號 7493185

研究成果: Patent

可擷取和傳送客製化應用之資訊的通用型嵌入式裝置與方法

Cheng, F-T., 2005 一月 13, 專利號 特許4303640號

研究成果: Patent

2004
12 引文 (Scopus)
Communication
Automatic guided vehicles
Wireless networks
Servers
Inspection
6 引文 (Scopus)

A holonic information exchange system for e-Manufacturing

Cheng, F-T. & Lin, C. T., 2004 十二月 1, p. 2377-2382. 6 p.

研究成果: Paper

Industry
Seizing
Data warehouses
Enterprise resource planning
Communication
2 引文 (Scopus)

An e-diagnostics framework with security considerations for semiconductor factories

Hung, M. H., Ho, R. W. & Cheng, F. T., 2004 十二月 1, 2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW. p. 37-40 4 p. (2004 Semiconductor Manufacturing Technology Workshop Proceedings, SMTW).

研究成果: Conference contribution

XML
Industrial plants
Semiconductor materials
Security systems
Information management
4 引文 (Scopus)

A quality prognostics scheme for semiconductor and TFT-LCD manufacturing processes

Su, Y. C., Cheng, F. T., Huang, G. W., Hung, M. H. & Yang, T., 2004 十二月 1, p. 1972-1977. 6 p.

研究成果: Paper

Liquid crystal displays
Semiconductor materials
Artificial intelligence
Physics
Statistics

Autonomous and universal remote control scheme

貢獻的翻譯標題: 自發性的通用型遙控系統與機制Cheng, F-T., 2004 一月 8, 專利號 7034713

研究成果: Patent

Remote control
Control systems
Controllers
1 引文 (Scopus)
Remote control
Controllers
Interfaces (computer)
Network protocols
Bluetooth
21 引文 (Scopus)

Development of an Ethernet-based equipment integration framework for factory automation

Hung, M. H., Tsai, J., Cheng, F-T. & Yang, H. C., 2004 十月 1, 於 : Robotics and Computer-Integrated Manufacturing. 20, 5, p. 369-383 15 p.

研究成果: Article

Factory automation
Ethernet
Automation
Real-time
Transmission control protocol
27 引文 (Scopus)
Recovery
Communication
Industry
Supply chains
Servers
46 引文 (Scopus)

Development of holonic manufacturing execution systems

Cheng, F. T., Chang, C. F. & Wu, S. L., 2004 四月 1, 於 : Journal of Intelligent Manufacturing. 15, 2, p. 253-267 15 p.

研究成果: Article

Flexible manufacturing systems
Systems analysis
Semiconductor materials
Recovery
Industry
2 引文 (Scopus)

Essential SMSs

Cheng, F. T., Yang, H. C. & Tsai, C. Y., 2004 三月 1, 於 : IEEE Robotics and Automation Magazine. 11, 1, p. 26-40 15 p.

研究成果: Review article

Managers
Plant management
Industrial plants
Semiconductor materials
2003
2 引文 (Scopus)
Software engineering
Testing
Software testing
Computer systems
Internet
44 引文 (Scopus)

Development of an e-Diagnostics/Maintenance framework for semiconductor factories with security considerations

Hung, M. H., Chen, K. Y., Ho, R. W. & Cheng, F-T., 2003 七月 1, 於 : Advanced Engineering Informatics. 17, 3-4, p. 165-178 14 p.

研究成果: Article

Industrial plants
Semiconductor materials
XML
Web services
Cryptography
6 引文 (Scopus)

Development of a web-services-based e-diagnostics framework

Hung, M. H., Cheng, F. T. & Yeh, S. C., 2003 十二月 9, 於 : Proceedings - IEEE International Conference on Robotics and Automation. 1, p. 596-603 8 p.

研究成果: Conference article

Web services
Semiconductor materials
Data integration
Electronic data interchange
Authentication

Equipment managemant method

Cheng, F-T., 2003 十一月 6, 專利號 7003367

研究成果: Patent