• 1149 引文
  • 19 h-指數
20012019
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研究成果 2001 2019

篩選
Conference contribution

Combinatorial methodologies applied to the advanced CMOS gate stack

Chang, K. S., Bassim, N. D., Schenck, P. K., Suehle, J., Takeuchi, I. & Green, M. L., 2007 十月 22, CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology. p. 297-302 6 p. (AIP Conference Proceedings; 卷 931).

研究成果: Conference contribution

CMOS
methodology
experimentation
metals
requirements

Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

Chang, K-S., Green, M. L., Suehle, J., Hattrick-Simpersb, J., Takeuchi, I., Ohmori, K., Chikyow, T., De Gendt, S. & Majhi, P., 2008 十一月 17, ECS Transactions - Dielectrics for Nanosystems 3: Materials Science, Processing, Reliability, and Manufacturing. 2 編輯 p. 151-159 9 p. (ECS Transactions; 卷 13, 編號 2).

研究成果: Conference contribution

Electrodes
Metals
Chemical analysis
Wavelength dispersive spectroscopy
Scanning
1 引文 (Scopus)

Controllability of flatband voltage in high-k gate stack structures - Remarkable advantages of la2O3 over HfO2

Ohmori, K., Ahmet, P., Shiraishi, K., Yamabe, K., Watanabe, H., Akasaka, Y., Umezawa, N., Nakajima, K., Yoshitake, M., Nakayama, T., Chang, K-S., Kakushima, K., Nara, Y., Green, M. L., Iwai, H., Yamada, K. & Chikyow, T., 2006 一月 1, ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. IEEE Computer Society, p. 376-379 4 p. 4098113. (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

研究成果: Conference contribution

Controllability
Electric potential
Gases
Charge transfer
Annealing

Exploration of magnetoelectric thin-film sensors using superlattice composition spreads

Chang, K-S., Aronova, M. A., Gao, C., Lin, C. L., Simpers, J. H., Murakami, M. & Takeuchi, I., 2003 一月 1, 2003 International Semiconductor Device Research Symposium, ISDRS 2003 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 1 p. 1272099. (2003 International Semiconductor Device Research Symposium, ISDRS 2003 - Proceedings).

研究成果: Conference contribution

Thin films
Sensors
Chemical analysis
Magnetization
Piezoelectric materials

Influences of annealing conditions on flatband voltage properties using continuously workfunction-tuned metal electrodes

Ohmori, K., Ahmet, P., Shiraishi, K., Watanabe, H., Akasaka, Y., Yamabe, K., Yoshitake, M., Chang, K-S., Green, M. L., Yamada, K. & Chikyow, T., 2006 十二月 1, 1st IEEE International Workshop on Nano CMOS, IEEE IWNC 2006. p. 160-162 3 p. 4570988. (2006 International Workshop on Nano CMOS - Proceedings, IWNC).

研究成果: Conference contribution

Annealing
Electrodes
Electric potential
Metals