羅 光耀

Professor

  • 679 引文
  • 14 h-指數
1992 …2020
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研究成果 1992 2019

  • 679 引文
  • 14 h-指數
  • 76 Article
  • 10 Conference contribution
  • 4 Conference article
  • 2 Paper
篩選
Conference article
2005
9 引文 (Scopus)

Physical and structural properties of RF magnetron sputtered ZnO films

Chang, R. C., Chu, S. V., Lo, K. Y., Lo, S. C. & Huang, Y. R., 2005 一月 1, 於 : Integrated Ferroelectrics. 69, p. 43-53 11 p.

研究成果: Conference article

Structural properties
Physical properties
physical properties
Substrates
Crystalline materials
2004

Copper surface protection with a completely enclosed copper structure for a damascene process

Wang, T. C., Hsieh, T. E., Wang, Y. L., Wu, Y. L., Lo, K-Y., Liu, C. W. & Chen, K. W., 2004 一月 30, 於 : Thin Solid Films. 447-448, p. 542-548 7 p.

研究成果: Conference article

Copper
copper
moisture
Integrated circuit manufacture
corrosion
6 引文 (Scopus)

Evaluation of advanced chemical mechanical planarization techniques for copper damascene interconnect

Chen, K. W., Wang, Y. L., Liu, C. P., Yang, K., Chang, L., Lo, K. Y. & Liu, C. W., 2004 一月 30, 於 : Thin Solid Films. 447-448, p. 531-536 6 p.

研究成果: Conference article

Cytidine Monophosphate
Chemical mechanical polishing
Polishing
Copper
platforms
14 引文 (Scopus)

Fluorine-modified low-k a-SiOC:H composite films prepared by plasma enhanced chemical vapor deposition

JangJean, S. K., Liu, C. P., Wang, Y. L., Hwang, W. S., Tseng, W. T., Chen, S. W. & Lo, K. Y., 2004 一月 30, 於 : Thin Solid Films. 447-448, p. 674-680 7 p.

研究成果: Conference article

Fluorine
Composite films
Plasma enhanced chemical vapor deposition
fluorine
vapor deposition