羅 光耀

Professor

  • 696 引文
  • 14 h-指數
1992 …2020

Research output per year

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研究成果

  • 696 引文
  • 14 h-指數
  • 76 Article
  • 10 Conference contribution
  • 4 Conference article
  • 2 Paper
篩選
Conference article

Physical and structural properties of RF magnetron sputtered ZnO films

Chang, R. C., Chu, S. V., Lo, K. Y., Lo, S. C. & Huang, Y. R., 2005 一月 1, 於 : Integrated Ferroelectrics. 69, p. 43-53 11 p.

研究成果: Conference article

9 引文 斯高帕斯(Scopus)

Fluorine-modified low-k a-SiOC:H composite films prepared by plasma enhanced chemical vapor deposition

JangJean, S. K., Liu, C. P., Wang, Y. L., Hwang, W. S., Tseng, W. T., Chen, S. W. & Lo, K. Y., 2004 一月 30, 於 : Thin Solid Films. 447-448, p. 674-680 7 p.

研究成果: Conference article

14 引文 斯高帕斯(Scopus)

Evaluation of advanced chemical mechanical planarization techniques for copper damascene interconnect

Chen, K. W., Wang, Y. L., Liu, C. P., Yang, K., Chang, L., Lo, K. Y. & Liu, C. W., 2004 一月 30, 於 : Thin Solid Films. 447-448, p. 531-536 6 p.

研究成果: Conference article

6 引文 斯高帕斯(Scopus)

Copper surface protection with a completely enclosed copper structure for a damascene process

Wang, T. C., Hsieh, T. E., Wang, Y. L., Wu, Y. L., Lo, K-Y., Liu, C. W. & Chen, K. W., 2004 一月 30, 於 : Thin Solid Films. 447-448, p. 542-548 7 p.

研究成果: Conference article