乙炔氣體的流量和鈦金屬的添加對於類鑽碳之機械與磨潤性質的影響

This study determines the mechanical and tribological properties of Diamond-Like Carbon (DLC), DLC doped titanium (DLC-Ti) and hydrogenated DLC doped titanium (DLC-CH-Ti) coatings. These coatings are deposited on a high-speed steel substrate (SKH51) using Closed Field Unbalanced Magnetron Sputtering (CFUBMS). GDS and EDX analysis shows that when acetylene flow rate is added in deposited chamber, the content of the metallic element (titanium) decreases. The surface morphology for all coatings exhibits a clustered morphology. The XPS analysis at the C1s core level shows that the C-C sp³ ratio increases as that acetylene gas and the titanium content are added. The DLC-CH-Ti coating has the optimal mechanical and tribological properties, with a wear rate of 0.09 (10^-6mm³/Nm) and a friction coefficient of 0.11as sliding against an Al₂O₃ ball. These results are much better than those for the other coatings. The wear rate is 194 times less than that for the substrate alone and the corrosion resistance of the coatings is better than that for the original substrate.