製造氧化物薄膜的方式

Jow-Lay Huang (Inventor), Jen-Sue Chen (Inventor), Jih-Jen Wu (Inventor)

研究成果: Patent

摘要

PROBLEM TO BE SOLVED: To provide a method of producing a large area oxide film while reducing the cost without the need for combination of expensive machine body facilities. SOLUTION: The method of producing an oxide film comprises: a step of preparing a paint containing a first precursor, fuel and a solvent; a step of coating a substrate with the paint; a step of annealing the paint on the substrate; and a step of converting the paint to an oxide film. The first precursor contains a first metal which is tungsten, nickel, titanium, zinc, copper or silver. The fuel includes any one of thiourea, urea, glycine, citric acid, or combinations thereof, and the solvent includes any one of water, alcohol, hydrogen peroxide water, or combinations thereof.
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專利號5848887
出版狀態Published - 2012 四月 19

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