摘要
We propose “the external reflectance versus height conversion (ERHC) method” for measuring the full-field three-dimensional surface topography of a sample height from one micron to 100 micrometers. It is similar to the camera method, capturing images reflected and/or not from a prism by using a lens and a CCD. The reflectance of a point in the image can be converted to the height of the point. The method can obtain large-area full-field real-time three-dimensional measurement results and has the advantages of simple operation, low cost, and easy assembly. The measurement area is in the range of a few square millimeters for each time. The lateral and vertical resolutions are 2 and 0.1 micrometers, respectively, and the error is about 1% compared with the confocal microscope.
原文 | English |
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頁(從 - 到) | 1154-1162 |
頁數 | 9 |
期刊 | OSA Continuum |
卷 | 3 |
發行號 | 5 |
DOIs | |
出版狀態 | Published - 2020 5月 15 |
All Science Journal Classification (ASJC) codes
- 電子、光磁材料
- 原子與分子物理與光學
- 電氣與電子工程