1-to-100-micron surface height full-field 3D topography by use of the external reflectance versus height conversion method

Ming Hung Chiu, Kai Hsiang Fan, Hsu Cheng Hsu, Wang Yang Li

研究成果: Article同行評審

摘要

We propose “the external reflectance versus height conversion (ERHC) method” for measuring the full-field three-dimensional surface topography of a sample height from one micron to 100 micrometers. It is similar to the camera method, capturing images reflected and/or not from a prism by using a lens and a CCD. The reflectance of a point in the image can be converted to the height of the point. The method can obtain large-area full-field real-time three-dimensional measurement results and has the advantages of simple operation, low cost, and easy assembly. The measurement area is in the range of a few square millimeters for each time. The lateral and vertical resolutions are 2 and 0.1 micrometers, respectively, and the error is about 1% compared with the confocal microscope.

原文English
頁(從 - 到)1154-1162
頁數9
期刊OSA Continuum
3
發行號5
DOIs
出版狀態Published - 2020 五月 15

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 電氣與電子工程

指紋

深入研究「1-to-100-micron surface height full-field 3D topography by use of the external reflectance versus height conversion method」主題。共同形成了獨特的指紋。

引用此