5 nm amorphous boron and carbon added Ru film as a highly reliable Cu diffusion barrier

Engineering & Materials Science

• Diffusion barriers 100%
• Boron 76%
• Carbon 51%
• X ray diffraction 44%
• Amorphous films 36%
• Diffraction patterns 32%
• Sheet resistance 31%
• Electron diffraction 29%
• Failure modes 19%
• Substrates 15%

Chemical Compounds

• Diffusion Barrier 85%
• Boron Atom 58%
• Amorphous Material 46%
• Liquid Film 32%
• Carbon Atom 31%
• Sheet Resistance 20%
• Electron Diffraction 17%
• X-Ray Diffraction 16%
• Purity 8%

Physics & Astronomy

• boron 58%
• carbon 45%
• failure modes 20%
• diffraction 18%
• x rays 15%
• electron diffraction 14%
• diffraction patterns 14%