72.3: Protrusive interception for TFT-LCDs using side-view illumination method

Fu Ming Tzu, Jung Hua Chou

研究成果: Article

摘要

An innovative method using side illuminations with digital CCDs to detect the specific protrusions for color filters of TFTLCD is developed in this study. The experimental results show that the detection of the protrusion with the height of 280 μm at ±7% uncertainty can be achieved within 3 seconds for the 1850 mm*1500 mm panel. In other words, the method is very effective to prevent the high-value photo-mask from damage.

原文English
頁(從 - 到)1077-1079
頁數3
期刊Digest of Technical Papers - SID International Symposium
41 1
DOIs
出版狀態Published - 2010 五月

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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