An innovative method using side illuminations with digital CCDs to detect the specific protrusions for color filters of TFTLCD is developed in this study. The experimental results show that the detection of the protrusion with the height of 280 μm at ±7% uncertainty can be achieved within 3 seconds for the 1850 mm*1500 mm panel. In other words, the method is very effective to prevent the high-value photo-mask from damage.
|頁（從 - 到）||1077-1079|
|期刊||Digest of Technical Papers - SID International Symposium|
|出版狀態||Published - 2010 五月|
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