A β-Ga2O3 solar-blind photodetector prepared by furnace oxidization of GaN thin film

W. Y. Weng, T. J. Hsueh, S. J. Chang, G. J. Huang, H. T. Hsueh

研究成果: Article同行評審

80 引文 斯高帕斯(Scopus)

摘要

The authors report the growth of β-Ga2 O3 thin film by simple furnace oxidation of GaN thin film and the fabrication of a solar-blind β-Ga2 O3 photodetector (PD). For the PD with an active area of 4.4 mm2 and 5-V applied bias, it was found that measured current was only 1.39 × 10-10 A in the dark and increased to 2.03 × 10-5 A when illuminated with 260-nm ultraviolet (UV) light (41.27 μW/cm2). It was also found that the fabricated PD exhibits an extremely large deep-UV-to-visible rejection ratio.

原文English
文章編號5582132
頁(從 - 到)999-1003
頁數5
期刊IEEE Sensors Journal
11
發行號4
DOIs
出版狀態Published - 2011

All Science Journal Classification (ASJC) codes

  • 儀器
  • 電氣與電子工程

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