This paper presents a first reported 60-GHz millimeter-wave integrated on-chip antenna and bandpass filter fabricated with a standard 0.18-μm complementary metaloxidesemiconductor (CMOS) process. The on-chip coplanar waveguide (CPW) bandpass filter utilizes a backed-side half-wavelength resonator integrated with a CPW-fed Yagi antenna. A finite-element-method-based 3-D full-wave electromagnetic solver, i.e., the High-Frequency Structure Simulator, is used for design simulation. A detailed on-wafer measurement methodology for the on-chip antenna is presented. The Friis power transmission formula is used to determine the radiation power gain and antenna pattern. The possible effect of the probe radiation, which may affect the accuracy of the antenna measurement, is also investigated. The proposed integrated on-chip antennafilter can be very useful for the integrated design of the 60-GHz CMOS single-chip radio-frequency transceiver.
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