A batch fabrication micro-ball array for optical coupling in free space communication

Sheng-Chih Shen, H. P. Chou

研究成果: Conference contribution

摘要

The paper presents novel concepts of batch fabrication of micro-ball lens array technology integrated on the silicon-based wafer by which can improve appropriate distance for optical fiber coupling. The silicon-based optical coupling platform consists of the self-parking framework (including flat-topped mesa and intersection of two v-grooves) and micro-ball lens array for optical fiber coupling purpose. The structure of optical coupling platform is able to improve distance between fiber and micro-ball lens and to increase coupling efficiency. Optical measurement reveals an insertion loss below 2.5dB with wavelength 635nm in single-mode fiber. The micro-ball lens array is batch fabricated by polymeric material and thick photoresist, and then bonded them onto flat-topped mesa correspondently that adjoins to the v-groove. The corner compensation offers a method to fabricate flat-topped mesa in the intersection of two v-grooves. This fabrication process not only provides accurate coupling distance between fibers and micro-ball lens, but also reduces micro-assembly cost.

原文English
主出版物標題Micro-Electro-Mechanical Systems (MEMS) - 2001
編輯A.L. Lee, J. Simon, K. Breuer, S. Chen, R.S. Keynton, A. Malshe, J.-I. Mou, M. Dunn
頁面851-857
頁數7
出版狀態Published - 2001 十二月 1
事件2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States
持續時間: 2001 十一月 112001 十一月 16

出版系列

名字American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)
3

Other

Other2001 ASME International Mechanical Engineering Congress and Exposition
國家United States
城市New York, NY
期間01-11-1101-11-16

指紋

Lenses
Fabrication
Communication
Optical fiber coupling
Silicon
Fibers
Parking
Photoresists
Single mode fibers
Insertion losses
Wavelength
Polymers
Costs

All Science Journal Classification (ASJC) codes

  • Engineering(all)

引用此文

Shen, S-C., & Chou, H. P. (2001). A batch fabrication micro-ball array for optical coupling in free space communication. 於 A. L. Lee, J. Simon, K. Breuer, S. Chen, R. S. Keynton, A. Malshe, J-I. Mou, ... M. Dunn (編輯), Micro-Electro-Mechanical Systems (MEMS) - 2001 (頁 851-857). (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS); 卷 3).
Shen, Sheng-Chih ; Chou, H. P. / A batch fabrication micro-ball array for optical coupling in free space communication. Micro-Electro-Mechanical Systems (MEMS) - 2001. 編輯 / A.L. Lee ; J. Simon ; K. Breuer ; S. Chen ; R.S. Keynton ; A. Malshe ; J.-I. Mou ; M. Dunn. 2001. 頁 851-857 (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)).
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Shen, S-C & Chou, HP 2001, A batch fabrication micro-ball array for optical coupling in free space communication. 於 AL Lee, J Simon, K Breuer, S Chen, RS Keynton, A Malshe, J-I Mou & M Dunn (編輯), Micro-Electro-Mechanical Systems (MEMS) - 2001. American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS), 卷 3, 頁 851-857, 2001 ASME International Mechanical Engineering Congress and Exposition, New York, NY, United States, 01-11-11.

A batch fabrication micro-ball array for optical coupling in free space communication. / Shen, Sheng-Chih; Chou, H. P.

Micro-Electro-Mechanical Systems (MEMS) - 2001. 編輯 / A.L. Lee; J. Simon; K. Breuer; S. Chen; R.S. Keynton; A. Malshe; J.-I. Mou; M. Dunn. 2001. p. 851-857 (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS); 卷 3).

研究成果: Conference contribution

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Shen S-C, Chou HP. A batch fabrication micro-ball array for optical coupling in free space communication. 於 Lee AL, Simon J, Breuer K, Chen S, Keynton RS, Malshe A, Mou J-I, Dunn M, 編輯, Micro-Electro-Mechanical Systems (MEMS) - 2001. 2001. p. 851-857. (American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)).