@article{57796f48385a417284530dd08ed29218,
title = "A Bifacial SnO2 Thin-Film Ethanol Gas Sensor",
abstract = "This letter produces a bifacial SnO2 thin-film ethanol gas sensor using micro-electro mechanical systems technology. A 1-μm-thick SnO2 film (290 μm × 290 μm) is deposited as the lower sensing layer, and a square (625 μm × 625 μm) 2-μm SnO2 is deposited as the upper sensing layer. For the interdigital transducer electrode and micro-heater, Cr is deposited at a thickness of 50-nm-thick Cr and Ni is deposited at a thickness of 250 nm. The measurement results show that with respect to the ethanol sensitivity, the bifacial structure has a much better ability to sense SnO2 than a single-sided sensing layer, at an optimum working temperature of 200°C.",
author = "Lu, {C. L.} and Chang, {S. J.} and Weng, {T. C.} and Hsueh, {T. J.}",
note = "Funding Information: Manuscript received May 25, 2018; revised May 30, 2018; accepted June 1, 2018. Date of publication June 13, 2018; date of current version July 24, 2018. This work was supported in part by the Ministry of Science and Technology, Taiwan, under Grant 106-2221-E-992-372-MY3, and in part by the National Nano Devices Laboratories, Tainan, Taiwan. The review of this letter was arranged by Editor E. A. Guti{\'e}rrez-D. (Corresponding author: T. J. Hsueh.) C. L. Lu, S. J. Chang, and T. C. Weng are with the Department of Electrical Engineering, Institute of Microelectronics, National Cheng Kung University, Tainan 701, Taiwan. Publisher Copyright: {\textcopyright} 2018 IEEE.",
year = "2018",
month = aug,
doi = "10.1109/LED.2018.2846807",
language = "English",
volume = "39",
pages = "1223--1225",
journal = "IEEE Electron Device Letters",
issn = "0741-3106",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "8",
}