A Bifacial SnO2 Thin-Film Ethanol Gas Sensor

C. L. Lu, S. J. Chang, T. C. Weng, T. J. Hsueh

研究成果: Article同行評審

5 引文 斯高帕斯(Scopus)


This letter produces a bifacial SnO2 thin-film ethanol gas sensor using micro-electro mechanical systems technology. A 1-μm-thick SnO2 film (290 μm × 290 μm) is deposited as the lower sensing layer, and a square (625 μm × 625 μm) 2-μm SnO2 is deposited as the upper sensing layer. For the interdigital transducer electrode and micro-heater, Cr is deposited at a thickness of 50-nm-thick Cr and Ni is deposited at a thickness of 250 nm. The measurement results show that with respect to the ethanol sensitivity, the bifacial structure has a much better ability to sense SnO2 than a single-sided sensing layer, at an optimum working temperature of 200°C.

頁(從 - 到)1223-1225
期刊IEEE Electron Device Letters
出版狀態Published - 2018 八月

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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