摘要
This letter produces a bifacial SnO2 thin-film ethanol gas sensor using micro-electro mechanical systems technology. A 1-μm-thick SnO2 film (290 μm × 290 μm) is deposited as the lower sensing layer, and a square (625 μm × 625 μm) 2-μm SnO2 is deposited as the upper sensing layer. For the interdigital transducer electrode and micro-heater, Cr is deposited at a thickness of 50-nm-thick Cr and Ni is deposited at a thickness of 250 nm. The measurement results show that with respect to the ethanol sensitivity, the bifacial structure has a much better ability to sense SnO2 than a single-sided sensing layer, at an optimum working temperature of 200°C.
| 原文 | English |
|---|---|
| 頁（從 - 到） | 1223-1225 |
| 頁數 | 3 |
| 期刊 | IEEE Electron Device Letters |
| 卷 | 39 |
| 發行號 | 8 |
| DOIs | |
| 出版狀態 | Published - 2018 八月 1 |
指紋
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering
引用此文
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A Bifacial SnO2 Thin-Film Ethanol Gas Sensor. / Lu, C. L.; Chang, Shoou-Jinn; Weng, T. C.; Hsueh, T. J.
於: IEEE Electron Device Letters, 卷 39, 編號 8, 01.08.2018, p. 1223-1225.研究成果: Article
TY - JOUR
T1 - A Bifacial SnO2 Thin-Film Ethanol Gas Sensor
AU - Lu, C. L.
AU - Chang, Shoou-Jinn
AU - Weng, T. C.
AU - Hsueh, T. J.
PY - 2018/8/1
Y1 - 2018/8/1
N2 - This letter produces a bifacial SnO2 thin-film ethanol gas sensor using micro-electro mechanical systems technology. A 1-μm-thick SnO2 film (290 μm × 290 μm) is deposited as the lower sensing layer, and a square (625 μm × 625 μm) 2-μm SnO2 is deposited as the upper sensing layer. For the interdigital transducer electrode and micro-heater, Cr is deposited at a thickness of 50-nm-thick Cr and Ni is deposited at a thickness of 250 nm. The measurement results show that with respect to the ethanol sensitivity, the bifacial structure has a much better ability to sense SnO2 than a single-sided sensing layer, at an optimum working temperature of 200°C.
AB - This letter produces a bifacial SnO2 thin-film ethanol gas sensor using micro-electro mechanical systems technology. A 1-μm-thick SnO2 film (290 μm × 290 μm) is deposited as the lower sensing layer, and a square (625 μm × 625 μm) 2-μm SnO2 is deposited as the upper sensing layer. For the interdigital transducer electrode and micro-heater, Cr is deposited at a thickness of 50-nm-thick Cr and Ni is deposited at a thickness of 250 nm. The measurement results show that with respect to the ethanol sensitivity, the bifacial structure has a much better ability to sense SnO2 than a single-sided sensing layer, at an optimum working temperature of 200°C.
UR - http://www.scopus.com/inward/record.url?scp=85048550295&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85048550295&partnerID=8YFLogxK
U2 - 10.1109/LED.2018.2846807
DO - 10.1109/LED.2018.2846807
M3 - Article
AN - SCOPUS:85048550295
VL - 39
SP - 1223
EP - 1225
JO - IEEE Electron Device Letters
JF - IEEE Electron Device Letters
SN - 0741-3106
IS - 8
ER -