A Bifacial SnO2 Thin-Film Ethanol Gas Sensor

C. L. Lu, Shoou-Jinn Chang, T. C. Weng, T. J. Hsueh

研究成果: Article

2 引文 (Scopus)

摘要

This letter produces a bifacial SnO2 thin-film ethanol gas sensor using micro-electro mechanical systems technology. A 1-μm-thick SnO2 film (290 μm × 290 μm) is deposited as the lower sensing layer, and a square (625 μm × 625 μm) 2-μm SnO2 is deposited as the upper sensing layer. For the interdigital transducer electrode and micro-heater, Cr is deposited at a thickness of 50-nm-thick Cr and Ni is deposited at a thickness of 250 nm. The measurement results show that with respect to the ethanol sensitivity, the bifacial structure has a much better ability to sense SnO2 than a single-sided sensing layer, at an optimum working temperature of 200°C.

原文English
頁(從 - 到)1223-1225
頁數3
期刊IEEE Electron Device Letters
39
發行號8
DOIs
出版狀態Published - 2018 八月 1

指紋

Chemical sensors
Ethanol
Thin films
Thick films
Transducers
Electrodes
Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

引用此文

Lu, C. L. ; Chang, Shoou-Jinn ; Weng, T. C. ; Hsueh, T. J. / A Bifacial SnO2 Thin-Film Ethanol Gas Sensor. 於: IEEE Electron Device Letters. 2018 ; 卷 39, 編號 8. 頁 1223-1225.
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A Bifacial SnO2 Thin-Film Ethanol Gas Sensor. / Lu, C. L.; Chang, Shoou-Jinn; Weng, T. C.; Hsueh, T. J.

於: IEEE Electron Device Letters, 卷 39, 編號 8, 01.08.2018, p. 1223-1225.

研究成果: Article

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