A biosensor chip by CMOS process for surface stress measurement in bioanalyte

S. M. Yang, T. I. Yin, C. Chang

研究成果: Article同行評審

12 引文 斯高帕斯(Scopus)

摘要

A 1 cm × 1 cm biosensor chip of integrated piezoresistive microcantilevers and microchannel is developed by CMOS process. The 125 μm × 60 μm × 1.1 μm microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure in situ the surface stress change induced by biochemical reaction. The temperature drift in biosensing is minimized by operating in the static mode of surface stress measurement, and the intrinsic electrical noise is also effectively reduced by the parallel microcantilever design and on-chip signal conditioning circuit. The biosensor performance is validated by measuring the thiol-modified single strained DNA to demonstrate its measurement sensitivity.

原文English
頁(從 - 到)707-714
頁數8
期刊Sensors and Actuators, B: Chemical
123
發行號2
DOIs
出版狀態Published - 2007 五月 21

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 儀器
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 金屬和合金
  • 電氣與電子工程
  • 材料化學

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