TY - JOUR
T1 - A chemoresistive hydrogen gas sensor prepared by a sputtered indium tungsten oxide thin film and palladium nanoparticles
AU - Jian, Jia Jin
AU - Chu, Pai Yi
AU - Wang, Jung Chuan
AU - Kuo, Chi Kang
AU - Lin, Kun Wei
AU - Liu, Wen Chau
N1 - Publisher Copyright:
© 2024 Hydrogen Energy Publications LLC
PY - 2025/1/20
Y1 - 2025/1/20
N2 - A new chemoresistive hydrogen (H2) gas sensor, incorporated by a radio frequency (RF) sputtered indium tungsten oxide (IWO) thin film and evaporated palladium nanoparticles (Pd NPs), is produced and studied in this work. The employed Pd NPs enhance the catalytic activity towards H2 gas due to their larger effective surface area, thereby improving the gas sensing performance. Various characterization techniques are used for structural, elemental, and compositional analyses. Gas measurements are conducted at 100 °C under various H2 gas concentrations. In an environment of 1% H2/air, the sensor exhibits a high sensing response of 1.8 × 106 with a response time of 88 s and a recovery time of 13 s at 100 °C. The device also demonstrates promised repeatability, long-term (180 days) durability, and selectivity. The influences of relative humidity RH(%) on the H2 gas sensing properties are studied in this work. Furthermore, the sensor shows advantages in terms of simple structure, ease of fabrication, and low cost.
AB - A new chemoresistive hydrogen (H2) gas sensor, incorporated by a radio frequency (RF) sputtered indium tungsten oxide (IWO) thin film and evaporated palladium nanoparticles (Pd NPs), is produced and studied in this work. The employed Pd NPs enhance the catalytic activity towards H2 gas due to their larger effective surface area, thereby improving the gas sensing performance. Various characterization techniques are used for structural, elemental, and compositional analyses. Gas measurements are conducted at 100 °C under various H2 gas concentrations. In an environment of 1% H2/air, the sensor exhibits a high sensing response of 1.8 × 106 with a response time of 88 s and a recovery time of 13 s at 100 °C. The device also demonstrates promised repeatability, long-term (180 days) durability, and selectivity. The influences of relative humidity RH(%) on the H2 gas sensing properties are studied in this work. Furthermore, the sensor shows advantages in terms of simple structure, ease of fabrication, and low cost.
UR - https://www.scopus.com/pages/publications/85211988158
UR - https://www.scopus.com/pages/publications/85211988158#tab=citedBy
U2 - 10.1016/j.ijhydene.2024.12.039
DO - 10.1016/j.ijhydene.2024.12.039
M3 - Article
AN - SCOPUS:85211988158
SN - 0360-3199
VL - 99
SP - 146
EP - 154
JO - International Journal of Hydrogen Energy
JF - International Journal of Hydrogen Energy
ER -
