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A chemoresistive hydrogen gas sensor prepared by a sputtered indium tungsten oxide thin film and palladium nanoparticles
Jia Jin Jian
, Pai Yi Chu
, Jung Chuan Wang
, Chi Kang Kuo
, Kun Wei Lin
,
Wen Chau Liu
微電子工程研究所
研究成果
:
Article
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同行評審
8
引文 斯高帕斯(Scopus)
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Keyphrases
Chemoresistant
100%
Tungsten Oxide Films
100%
Hydrogen Gas Sensor
100%
Palladium Nanoparticles (PdNPs)
100%
Indium Tungsten Oxide
100%
H2 Gas
66%
Response Time
33%
Recovery Time
33%
Repeatability
33%
Elemental Analysis
33%
Compositional Analysis
33%
Catalytic Activity
33%
Gas Concentration
33%
Radio Frequency
33%
Humidity
33%
H2-air
33%
Sensing Response
33%
Gas Sensing Properties
33%
Characterization Techniques
33%
Gas Measurement
33%
Effective Surface Area
33%
Gas Sensing Performance
33%
H2 Gas Sensor
33%
H2 Gas Sensing
33%
Material Science
Indium
100%
Thin Films
100%
Nanoparticle
100%
Oxide Compound
100%
Palladium
100%
Gas Sensor
100%
Tungsten
100%
Catalyst Activity
33%
Engineering
Hydrogen Gas
100%
Thin Films
100%
Nanoparticle
100%
Gas Sensor
100%
Response Time
33%
Repeatability
33%
Radio Frequency
33%
Relative Humidity
33%
Recovery Time
33%
Enzymatic Activity
33%
Sensing Property
33%
Sensing Performance
33%
Chemical Engineering
Film
100%
Nanoparticle
100%
Indium
100%
Chemical Element
33%
Gas Fuel Measurement
33%