In this paper, it presents the fully CMOS compatible pH sensor device for detecting hydrogen ions. Without any deposition layer, the sensing membrane is formed naturally on the top of metal. To minimize the whole system size, the commercial Ag/AgCl electrode is replaced by gold electrode. The sensitivity is 215uA/pH by using gold electrode as reference electrode. The 0.1pH resolution could be achieved in both setups. The results showed the sensitivity and linearity are comparable by using commercial electrode or gold electrode as the reference electrode. This work demonstrates ISFET device with native aluminum oxide can detect the pH value during 6.9~8, which is suitable for the application of urea detection.
All Science Journal Classification (ASJC) codes
- Chemical Engineering(all)