A fully compatible CMOS-based hydrogen ion sensor using natural forming sensing membrane for urea detecting application

Ying Zong Juang, Chen Fu Lin, Hann Huei Tsai, Yan Kuin Su, Ruey Lue Wang, Wang Long Li, Po Cheng Kung

研究成果: Conference article同行評審

7 引文 斯高帕斯(Scopus)

摘要

In this paper, it presents the fully CMOS compatible pH sensor device for detecting hydrogen ions. Without any deposition layer, the sensing membrane is formed naturally on the top of metal. To minimize the whole system size, the commercial Ag/AgCl electrode is replaced by gold electrode. The sensitivity is 215uA/pH by using gold electrode as reference electrode. The 0.1pH resolution could be achieved in both setups. The results showed the sensitivity and linearity are comparable by using commercial electrode or gold electrode as the reference electrode. This work demonstrates ISFET device with native aluminum oxide can detect the pH value during 6.9~8, which is suitable for the application of urea detection.

原文English
頁(從 - 到)1067-1070
頁數4
期刊Procedia Chemistry
1
發行號1
DOIs
出版狀態Published - 2009 九月
事件Eurosensors 23rd Conference - Lausanne, Switzerland
持續時間: 2009 九月 62009 九月 9

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Chemical Engineering(all)

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