TY - JOUR
T1 - A high-performance Pd nanoparticle (NP)/WO3 thin-film-based hydrogen sensor
AU - Lee, Cheng
AU - Liu, Wen Chau
N1 - Publisher Copyright:
© 1980-2012 IEEE.
PY - 2019/7
Y1 - 2019/7
N2 - A new and high-performance Pd nanoparticle (NP)/WO3 thin-film-based sensor is fabricated by vacuum thermal evaporation (VTE) and RF sputtering herein. Based on the remarkable catalytic activity of Pd NPs and high-quality WO3 thin film (20 nm in thickness), excellent hydrogen sensing properties, including a very high sensing response of 1.8 × 104 (in 1000 ppm H2/air gas at 175°C), an extremely low detecting level (≤5 ppm H2/air), a relatively low optimal operating temperature of 175°C, and a fast sensing speed, are obtained. In addition, the studied Pd NP/WO3-based device shows the advantages of simple structure, low cost, and easy fabrication process. The studied device is, therefore, promising for high-performance hydrogen sensing applications.
AB - A new and high-performance Pd nanoparticle (NP)/WO3 thin-film-based sensor is fabricated by vacuum thermal evaporation (VTE) and RF sputtering herein. Based on the remarkable catalytic activity of Pd NPs and high-quality WO3 thin film (20 nm in thickness), excellent hydrogen sensing properties, including a very high sensing response of 1.8 × 104 (in 1000 ppm H2/air gas at 175°C), an extremely low detecting level (≤5 ppm H2/air), a relatively low optimal operating temperature of 175°C, and a fast sensing speed, are obtained. In addition, the studied Pd NP/WO3-based device shows the advantages of simple structure, low cost, and easy fabrication process. The studied device is, therefore, promising for high-performance hydrogen sensing applications.
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U2 - 10.1109/LED.2019.2915537
DO - 10.1109/LED.2019.2915537
M3 - Article
AN - SCOPUS:85068140616
SN - 0741-3106
VL - 40
SP - 1194
EP - 1197
JO - IEEE Electron Device Letters
JF - IEEE Electron Device Letters
IS - 7
M1 - 8709960
ER -