A high-performance Pd nanoparticle (NP)/WO3 thin-film-based hydrogen sensor

Cheng Lee; Wen Chau Liu

doi:10.1109/LED.2019.2915537

A high-performance Pd nanoparticle (NP)/WO₃ thin-film-based hydrogen sensor

Cheng Lee
, Wen Chau Liu

微電子工程研究所

研究成果: Article › 同行評審

24 引文斯高帕斯（Scopus）

摘要

A new and high-performance Pd nanoparticle (NP)/WO₃ thin-film-based sensor is fabricated by vacuum thermal evaporation (VTE) and RF sputtering herein. Based on the remarkable catalytic activity of Pd NPs and high-quality WO₃ thin film (20 nm in thickness), excellent hydrogen sensing properties, including a very high sensing response of 1.8 × 10⁴ (in 1000 ppm H₂/air gas at 175°C), an extremely low detecting level (≤5 ppm H₂/air), a relatively low optimal operating temperature of 175°C, and a fast sensing speed, are obtained. In addition, the studied Pd NP/WO₃-based device shows the advantages of simple structure, low cost, and easy fabrication process. The studied device is, therefore, promising for high-performance hydrogen sensing applications.

原文	English
文章編號	8709960
頁（從 - 到）	1194-1197
頁數	4
期刊	IEEE Electron Device Letters
卷	40
發行號	7
DOIs	https://doi.org/10.1109/LED.2019.2915537
出版狀態	Published - 2019 7月

All Science Journal Classification (ASJC) codes

電子、光磁材料
電氣與電子工程

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10.1109/LED.2019.2915537

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title = "A high-performance Pd nanoparticle (NP)/WO3 thin-film-based hydrogen sensor",

abstract = "A new and high-performance Pd nanoparticle (NP)/WO3 thin-film-based sensor is fabricated by vacuum thermal evaporation (VTE) and RF sputtering herein. Based on the remarkable catalytic activity of Pd NPs and high-quality WO3 thin film (20 nm in thickness), excellent hydrogen sensing properties, including a very high sensing response of 1.8 × 104 (in 1000 ppm H2/air gas at 175°C), an extremely low detecting level (≤5 ppm H2/air), a relatively low optimal operating temperature of 175°C, and a fast sensing speed, are obtained. In addition, the studied Pd NP/WO3-based device shows the advantages of simple structure, low cost, and easy fabrication process. The studied device is, therefore, promising for high-performance hydrogen sensing applications.",

author = "Cheng Lee and Liu, \{Wen Chau\}",

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AB - A new and high-performance Pd nanoparticle (NP)/WO3 thin-film-based sensor is fabricated by vacuum thermal evaporation (VTE) and RF sputtering herein. Based on the remarkable catalytic activity of Pd NPs and high-quality WO3 thin film (20 nm in thickness), excellent hydrogen sensing properties, including a very high sensing response of 1.8 × 104 (in 1000 ppm H2/air gas at 175°C), an extremely low detecting level (≤5 ppm H2/air), a relatively low optimal operating temperature of 175°C, and a fast sensing speed, are obtained. In addition, the studied Pd NP/WO3-based device shows the advantages of simple structure, low cost, and easy fabrication process. The studied device is, therefore, promising for high-performance hydrogen sensing applications.

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A high-performance Pd nanoparticle (NP)/WO3 thin-film-based hydrogen sensor

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A high-performance Pd nanoparticle (NP)/WO₃ thin-film-based hydrogen sensor