TY - GEN
T1 - A high sensitivity CMOS compatible urea enzyme field effect transistor without enzyme immobilizationer
AU - Lin, Chen Fu
AU - Juang, Ying Zong
AU - Tsai, Hann Huei
AU - Liao, Hsin Hao
AU - Chen, Ping Hong
AU - Syu, Mei-Jywan
AU - Fu, Chien Cheng
AU - Wang, Ruey Lue
PY - 2012/12/1
Y1 - 2012/12/1
N2 - This paper presents a complementary metal-oxide-semiconductor (CMOS) compatible urea enzyme field effect transistor (FET) without enzyme immobilization. The natural formed aluminum oxide (Al2O3) above the top metal is used as the hydrogen sensing membrane. All the devices were fabricated by TSMC 0.35μm 2P4M CMOS process. In order to realize the micro sensing biological sensing system, the traditional Ag/AgCl reference electrode is replaced by the pseudo Ag/AgCl reference electrode in this study. First, the pH-FET is measured with the pseudo Ag/AgCl reference electrode. The sensitivity is 52.7mV/pH. Then, the droplet contains urea, urease, and Tris buffer solution was adopted above the sensing area. It gives a linear response when the urea concentration is varied from 1∼11mM. And it shows a slope of 88.7mV/mM. This result demonstrates that a CMOS compatible urea biosensor could be realized without immobilizing the urease above the sensing area.
AB - This paper presents a complementary metal-oxide-semiconductor (CMOS) compatible urea enzyme field effect transistor (FET) without enzyme immobilization. The natural formed aluminum oxide (Al2O3) above the top metal is used as the hydrogen sensing membrane. All the devices were fabricated by TSMC 0.35μm 2P4M CMOS process. In order to realize the micro sensing biological sensing system, the traditional Ag/AgCl reference electrode is replaced by the pseudo Ag/AgCl reference electrode in this study. First, the pH-FET is measured with the pseudo Ag/AgCl reference electrode. The sensitivity is 52.7mV/pH. Then, the droplet contains urea, urease, and Tris buffer solution was adopted above the sensing area. It gives a linear response when the urea concentration is varied from 1∼11mM. And it shows a slope of 88.7mV/mM. This result demonstrates that a CMOS compatible urea biosensor could be realized without immobilizing the urease above the sensing area.
UR - http://www.scopus.com/inward/record.url?scp=84873977157&partnerID=8YFLogxK
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U2 - 10.1109/ICSENS.2012.6411439
DO - 10.1109/ICSENS.2012.6411439
M3 - Conference contribution
AN - SCOPUS:84873977157
SN - 9781457717659
T3 - Proceedings of IEEE Sensors
BT - IEEE SENSORS 2012 - Proceedings
T2 - 11th IEEE SENSORS 2012 Conference
Y2 - 28 October 2012 through 31 October 2012
ER -