A high-speed low-voltage double-switch optical crossconnect using stress-induced bending micromirrors

Ju Nan Kuo, Gwo Bin Lee, Wen Fung Pan

研究成果: Article同行評審

14 引文 斯高帕斯(Scopus)

摘要

A high-speed low-voltage double-switch electrostatically actuated optical crossconnect (OXC) is demonstrated using stress-induced bending micromirrors. A curved polysilicon seesaw structure substantially lowers the electrostatic operating voltage of the OXC and provides a double-switch option. Large mirror deflection angles of 13° (mirror elevation of 290 μm high) and 5° (cantilever deflection of 90 μm high), corresponding to low operating voltages of 25 and 18 V, could be obtained. A submillisecond switching time (<850 μs), a low optical insertion loss (0.65 dB), and a small polarization-dependent loss (<0.08 dB) are achieved.

原文English
頁(從 - 到)2042-2044
頁數3
期刊IEEE Photonics Technology Letters
16
發行號9
DOIs
出版狀態Published - 2004 9月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 電氣與電子工程

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