A hybrid nano-imprinting lithography based on infrared pulsed laser heating

研究成果: Conference contribution

摘要

In this paper we present a novel method of nano-imprinting which adopts important features of conventional nano-imprinting lithography (NIL) and the newly developed laser-assisted direct imprinting (LADI) method. It utilizes an Nd-YAG pulsed laser of wavelength 1064 nm which can easily penetrate and also heat up a silicon mold which is pressed against a resist layer deposited on a substrate. The fast rising temperature in the silicon mold can momentarily melt the resist layer so that the mold is imprinting into the resist layer. After the pattern is transformed, standard nano-imprinting lithography processes can be applied to the substrate for nano-fabrication. This new method has several advantages over existing nano-imprinting methods mostly due to the fast heating-up of silicon mold by high intensity IR laser pulse and therefore has no thermal drifting problem. Both the theoretical modeling and experimental results of this novel IR-laser assisted imprinting method will be presented.

原文English
主出版物標題Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
頁面6-10
頁數5
DOIs
出版狀態Published - 2006 十二月 1
事件1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China
持續時間: 2006 一月 182006 一月 21

出版系列

名字Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Other

Other1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
國家China
城市Zhuhai
期間06-01-1806-01-21

指紋

Laser heating
Infrared lasers
Silicon
Pulsed lasers
Heating
Lithography
Lasers
Fungi
Heat problems
Substrates
Nanotechnology
Hot Temperature
Laser pulses
Solid-State Lasers
Wavelength
Temperature

All Science Journal Classification (ASJC) codes

  • Biotechnology
  • Materials Science (miscellaneous)

引用此文

Lee, Y. C., Chen, C. H., & Liu, C. P. (2006). A hybrid nano-imprinting lithography based on infrared pulsed laser heating. 於 Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS (頁 6-10). [4134891] (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS). https://doi.org/10.1109/NEMS.2006.334591
Lee, Yung Chun ; Chen, Chun Hung ; Liu, Chuan Pu. / A hybrid nano-imprinting lithography based on infrared pulsed laser heating. Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. 頁 6-10 (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).
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Lee, YC, Chen, CH & Liu, CP 2006, A hybrid nano-imprinting lithography based on infrared pulsed laser heating. 於 Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS., 4134891, Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, 頁 6-10, 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, Zhuhai, China, 06-01-18. https://doi.org/10.1109/NEMS.2006.334591

A hybrid nano-imprinting lithography based on infrared pulsed laser heating. / Lee, Yung Chun; Chen, Chun Hung; Liu, Chuan Pu.

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 6-10 4134891 (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS).

研究成果: Conference contribution

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Lee YC, Chen CH, Liu CP. A hybrid nano-imprinting lithography based on infrared pulsed laser heating. 於 Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 6-10. 4134891. (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS). https://doi.org/10.1109/NEMS.2006.334591